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Surface Metrology

Department 5.1

Tasks and aims

Department 5.1 - "Surface Metrology"


  • is responsible for the traceability of lengthsmeasurement and of parameters in surface metrology, i.e.
  • for the calibration of step and depth setting standards
  • for the calibration of roughness standards
  • for the calibration of hardness reference blocks
  • for the calibration of the layer thickness
  • for the calibration of the resistant to bending of cantilevers and of the stiffness of micro-electromechanical systems (MEMS) 

This Department …

  • participates in the elaboration of standards and directives for surface metrology in national (VDI, DKD, DIN) and international committees (ISO, IMEKO),
  • pursues and supports the development of standards and reference objects in the field of surface metrology, i.e. for tactile and optical procedures and for methods using scanning force microscopes, as well as for hardness and layer thickness metrology,
  • is active in the field of research and development of new measuring instruments and measurement procedure as well as algorithms for the analysis and evaluation of data.


Opens internal link in current windowProfilscanner with Si-microprobe

Fast surface measurements (roughness, E-module, hardness, deposits) with Si microprobes in injection nozzles.

Opens internal link in current windowLight-induced force
Proof of the theoretically predicted light attraction between coplanar plates with small distance.
Mono-atomic step-height standards
Processing procedure and measurement capabilities on mono-atomic steps on otherwise atomically smooth Si surfaces.
Lateral resolution standards
Geometry, manufacture, measurement and evaluation procedure of lateral resolution standards for microscopy and tactile measurement procedures.
Opens internal link in current windowSoftware developement for roughness parameter determination
Development of software for determination of the roughness parameters from surface measurements.