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Production sequence of Si-spheres and interferometrical determination of the sphere volume

Precision Engineering

Division 5

Dimensions from several metres down to nanometres — precise dimensional metrology as backbone of a reliable and sustainable industrial production.


It is the main task of the division to assure the traceability of industrial measurements in different length and angle ranges by application of special measuring instruments, methods and standards. Also hardness metrology belongs to its scope. The aim of these activities is to offer traceability to industry in an adequate way and to jointly solve respective measurement challenges.
The research and development activities needed for these tasks focus on new measurement methods, instrumentation and standards. In addition the division is engaged in manufacturing and measurement tasks in the field foundations of metrology. The Scientific Instrumentation offers construction and manufacturing services for special components and precision instruments for the whole PTB.

5 Abteilungsbericht aus dem Jahresbericht 2022

Der Opens internal link in current windowAbteilungsbericht gibt einen Überblick über die wichtigsten Nachrichten und Ereignisse der Abteilung „Fertigungsmesstechnik“ des letzten Jahres und ergänzt somit den Opens internal link in current windowJahresbericht-2022 der PTB.


The maximum slope that can be measured with a microscope objective is an important parameter characterizing the measurement capability of 3D optical microscopes. Presented are optically smooth spheres as material measure, the measurement procedure, the maximum measurable local slopes and the characterization of the homogeneity of the slope transfer function within the field of view of the objective of a confocal microscope.

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In the recently completed EMPIR project 17IND05 MicroProbes (Multifunctional ultrafast microprobes for on ‐ the ‐ machine measurements), tactile piezoresistive microprobes were successfully tested on industrial measuring machines for the first time. With these micro probes, not only the topography, but also the mechanical properties of surfaces can be measured. By integrating such micro probes into the manufacturing process, inline product inspection can be done 30 times faster compared to offline inspection methods.

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Within the EMPIR Project 19ENG05 NanoWires, a multifunctional MEMS picoindenter measurement platform for nanoelectric, nanomechanical and topographic investigation of surfaces for energy harvesting applications on the basis of nanowires has been developed. The new microelectromechanical system (MEMS) based measurement platform is characterised by its flexible design and modular software framework.

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Data Analysis Service for Precision Engineering

The data analysis support provides advice to adopt numerical and system theoretical procedures to the specific tasks of the different departments. The support covers detailed advice and implementation support as well as tests and comparisons. Furthermore, the roughness reference software RPTB is also taken care of here, Opens external link in new windowhttps://www.ptb.de/rptb.

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