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Production sequence of Si-spheres and interferometrical determination of the sphere volume

Precision Engineering

Division 5

Dimensions from several metres down to nanometres — precise dimensional metrology as backbone of a reliable and sustainable industrial production.


It is the main task of the division to assure the traceability of industrial measurements in different length and angle ranges by application of special measuring instruments, methods and standards. Also hardness metrology belongs to its scope. The aim of these activities is to offer traceability to industry in an adequate way and to jointly solve respective measurement challenges.
The research and development activities needed for these tasks focus on new measurement methods, instrumentation and standards. In addition the division is engaged in manufacturing and measurement tasks in the field foundations of metrology. The Scientific Instrumentation offers construction and manufacturing services for special components and precision instruments for the whole PTB.

5 Abteilungsbericht aus dem Jahresbericht 2019

Neuartiges Verfahren zur Kalibrierung von Gewinden unter der Verwendung eines ganzheitlichen Ansatzes

Der Initiates file downloadAbteilungsbericht gibt einen Überblick über die wichtigsten Nachrichten und Ereignisse der Abteilung „Fertigungsmesstechnik“ des letzten Jahres und ergänzt somit den Opens internal link in current windowJahresbericht-2019 der PTB.


In June 2020 the EMPIR network project "Support for a European Metrology Network on Advanced Manufacturing" was started. This project targets at the strengthening of European manufacturing industry through innovative metrology. For the first time, a coordination at the European level will be realised, which enables an infrastructure for sharing of metrological knowledge. Moreover, a research agenda will be developed in a dialogue with stakeholders from different industry sectors, which will support and accelerate the development and integration of metrology for advanced manufacturing.

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High-speed roughness measurements with piezoresistive silicon microprobes require good dynamic properties of the probe. For this purpose, tip flight tests were carried out with these microprobes on rectangular structures, in which the flight distance of the microprobe tips in the rectangular grooves was measured as a function of the probing force and the traverse speed. For the investigated probing forces of 2 µN to 12 µN and the investigated traverse speeds of 20 µm/s to 10 mm/s, no tip flight was observed for the investigated 5 mm long microprobes; they therefore show excellent dynamic...

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A novel 3D measuring method based on scanning electron microscopy and the "shape from shading" reconstruction approach was tested to characterize the shape of silicon-microprobe-tips. It could be shown that there is an optimal working distance, that tilting of up to 2 ° is tolerable, that the rotation of the sample is not critical for flat samples, but that there are edge deviations in the image for topographic structures. The system is suitable for the evaluation of microprobe tips and their morphology in the topmost tip area and allows high-resolution 3D-reconstructions within a few seconds.

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Data Analysis Service for Precision Engineering

The data analysis support provides advice to adopt numerical and system theoretical procedures to the specific tasks of the different departments. The support covers detailed advice and implementation support as well as tests and comparisons. Furthermore, the roughness reference software RPTB is also taken care of here, Opens external link in new windowhttps://www.ptb.de/rptb.

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