| Dr. Bernd Bodermann Tel.: +49 (0) 531 592-4222 Fax: +49 (0) 531 592-69-4222 E-Mail: bernd.bodermann(at)ptb.de |
Head of Working Group |
| Dr. Matthias Wurm Tel.: +49 (0) 531 592-4223 E-Mail: matthias.wurm(at)ptb.de |
Scatterometry, ellipsometry, Mueller polarimetry, sub-wavelength-metrology, modelling and simulations |
| Alexander Diener Tel.: +49 (0) 531 592-4224 E-Mail: alexander.diener(at)ptb.de |
Scatterometry, ellipsometry, Mueller polarimetry, Measurements of grating periods by means of opt. diffraction |
| Detlef Bergmann Tel.: +49 (0) 531 592-4226 E-Mail: detlef.bergmann(at)ptb.de |
UV/DUV-microscopy, AGID-microscopy |
| Marcel Janik Tel.: +49 (0) 531 592-4285 E-Mail: marcel.janik(at)ptb.de |
Mechanical constructions |
| Martina Kemlitz Tel.: +49 (0) 531 592-4228 E-Mail: martina.kemlitz(at)ptb.de |
UV/DUV-microscopy |
| Matthias Sturm Tel.: +49 (0) 531 592-4227 E-Mail: matthias.sturm(at)ptb.de |
(Müller) Ellipsometrie, Scatterometrie, UV/DUV-Mikroskopie |
| Jana Grundmann Tel.: +49 (0) 531 592-4229 |
Imaging Mueller ellipsometry |
| Tim Käseberg Tel.: +49 (0) 531 592-4233 |
Functional nanostructures |
| Jan Krüger Tel.: +49 (0) 531 592-4234 |
Optical bidirectional measurements |