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Staff 4.23

Dr. Bernd Bodermann
Tel.:  +49 (0) 531 592-4222
Fax:  +49 (0) 531 592-69-4222
E-Mail: bernd.bodermann(at)ptb.de
Head of Working Group
Dr. Matthias Wurm
Tel.:  +49 (0) 531 592-4223
E-Mail: matthias.wurm(at)ptb.de
Scatterometry, ellipsometry, Mueller polarimetry, sub-wavelength-metrology, modelling and simulations
Alexander Diener
Tel.:  +49 (0) 531 592-4224
E-Mail: alexander.diener(at)ptb.de
Scatterometry, ellipsometry, Mueller polarimetry, Measurements of grating periods by means of opt. diffraction
Detlef Bergmann
Tel.:  +49 (0) 531 592-4226
E-Mail: detlef.bergmann(at)ptb.de
UV/DUV-microscopy, AGID-microscopy
Marcel Janik
Tel.:  +49 (0) 531 592-4285
E-Mail: marcel.janik(at)ptb.de
Mechanical constructions
Martina Kemlitz
Tel.:  +49 (0) 531 592-4228
E-Mail: martina.kemlitz(at)ptb.de
UV/DUV-microscopy
Sven Teichert
Tel.:  +49 (0) 531 592-4529
E-Mail: sven.teichert(at)ptb.de
Ellipsometry, Mueller polarimetry
Jana Grundmann

Tel.:  +49 (0) 531 592-4229
E-Mail: jana.grundmann(at)ptb.de

AGID-microscopy