AG 4 23

Publications 4.23

Opens internal link in current window Review article: Quantitative microscopy and dimensional nanometrology

Opens internal link in current window Reference standards

Opens internal link in current window Optical microscopy

Opens internal link in current window AGID microscopy

Opens internal link in current window DUV microscopy

Opens internal link in current window Scatterometry

Opens internal link in current window Diffractometry (grating periods measured by optical diffraction)

Opens internal link in current window Spectroscopic ellipsometry and Mueller matrix ellipsometry

Opens internal link in current window Optical sub-wavelength and nanometrology

Opens internal link in current window Modelling