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Form and Wavefront Metrology

Working Group 4.21

Working subject: New Flatness Measuring System DFR

Selected Publications

[1] G. Ehret, M. Schulz, M. Baier, A. Fitzenreiter: A new optical flatness reference measurement system; DGaO-Proceedings, 110. Jahrestagung der Deutschen Gesellschaft für angewandte Optik (DGaO), Brescia, 02-05, Juni, 2009, [Online only] (2009),  http://www.dgao-proceedings.de/download/110/110_p22.pdf

[2] G. Ehret, M. Schulz, M. Stavridis, C. Elster: A new flatness reference measurement system based on deflectometry and difference deflectometry, Fringe: 6th International Workshop on Advanced Optical Metrology: pp. 318-323, (2009)

[3] M. Schulz, G. Ehret, M. Stavridis, C. Elster: Concept, design and capability analysis of the new Deflectometric Flatness Reference at PTB, International Workshop on x-ray mirror design, fabrication and metrology, Osaka, Japan, Nucl. Instr. and Methods in Phys. Res. A616, pp. 134-139, (2010)

[4] G. Ehret, M. Schulz, M. Baier, A. Fitzenreiter, M. Stavridis, C. Elster: Vergleich von hochgenauen deflektometrischen Verfahren für die Ebenheitsmetrologie; 111. Jahrestagung der Deutschen Gesellschaft für angewandte Optik (DGaO), Wetzlar, 25-29, Mai, 2010, [Online only], (2010), http://www.dgao-proceedings.de/download/111/111_a20.pdf

[5] M. Schulz, G. Ehret, A. Fitzenreiter: Scanning deflectometric form measurement avoiding path-dependent angle measurement errors;  Journal of the European Optical Society: Rapid Publications (2010), www.jeos.org/index.php/jeos_rp/article/view/10026/596