01.10.2019
Airborne molecular contamination (AMC) in the form of chemical vapors or aerosols have a detrimental effect on products, processes or instruments. WG 3.42 will develop a spectroscopic method within this project, which is based on the combination of direct tunable diode laser absorption spectroscopy (dTDLAS) and wavelength modulation spectroscopy (WMS), and which will aim the measurement of HCl concentration with a detection limit below 1 nmol/mol.