Quantum Electronics

Fabrication Technology
in the Clean-room Facility

High frequency sputtering system for the deposition of dielectric layers, equiped with three targets for SiO₂, Si₃N₄ and Al₂O₃

Vacuum system for thin-film deposition by sputtering

Contact

Dr.-Ing. Mark Bieler

Phone: +49 531 592-2400
Email:
mark.bieler(at)ptb.de

Phone: +49 531 592-2401
Fax: +49 531 592-2405
Email:
Sekretariat2.4(at)ptb.de

Physikalisch-Technische Bundesanstalt
Bundesallee 100
38116 Braunschweig