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Quantum Electronics

Fabrication Technology
in the Clean-room Facility

An employee is working at deposition equipment in the white area of the PTB clean room center

For the production of quantum devices, the department "Quantum Electronics" operates the clean-room facility of PTB containing the required thin film technology and the lithographic equipment for the fabrication of highly integrated metallic devices based on superconductors and normal conductors with structural dimensions down to 10 nm. Different technological equipment is needed for the fabrication of these micro and nanoelectronic structures.

Two dilution refrigerators are additionally available for the realisation of low temperature investigations of the fabricated devices.

All working groups of the department "Quantum Electronics" are using the technology: