Quantum Electronics

For the production of quantum devices, the department "Quantum Electronics" operates the clean-room facility of PTB containing the required thin film technology and the lithographic equipment for the fabrication of highly integrated metallic devices based on superconductors and normal conductors with structural dimensions down to 10 nm. Different technological equipment is needed for the fabrication of these micro and nanoelectronic structures.

• Lithographic systems for exposure of structures in photoresist:
  
  
  • Optical lithography
    
  • Electron beam lithography
    

• Thin film deposition equipment for fabrication of thin metallic and insulating layers.
  
• Etching systems for patterning of metallic and insulating layers.
  

Two dilution refrigerators are additionally available for the realisation of low temperature investigations of the fabricated devices.

All working groups of the department "Quantum Electronics" are using the technology: 

• Single-charge Circuits 
• Josephson Circuits 
• Nanostructuring and Clean Room Center Infrastructure