Field-Emission Scanning-Electron-Microscope (SEM)
| Emitter | Schottky-Fieldemitter 0.1 - 30 keV |
| Resolution | 1.3 nm at 15 kV |
| Detectors | In-Lens SE Detector Chamber SE Detector BSE Detektor |
| Emitter | Schottky-Fieldemitter 0.1 - 30 keV |
| Resolution | 1.3 nm at 15 kV |
| Detectors | In-Lens SE Detector Chamber SE Detector BSE Detektor |