
Field-Emission Scanning-Electron-Microscope (SEM)
Emitter | Schottky-Fieldemitter 0.1 - 30 keV |
Resolution | 1.3 nm at 15 kV |
Detectors | In-Lens SE Detector Chamber SE Detector BSE Detektor |
Emitter | Schottky-Fieldemitter 0.1 - 30 keV |
Resolution | 1.3 nm at 15 kV |
Detectors | In-Lens SE Detector Chamber SE Detector BSE Detektor |