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Field emission - scanning electron microscope (FE-SEM)
| Manufacturer: | ZEISS |
| Type: | GeminiSEM 560 |
| Year of manufacture: | 2022 |
| Emitter | Schottky - field emission cathode |
| Acceleration voltage: | 0.02 - 30 kV |
| max. Resolution: | 0.5 nm at 15 kV |
| Detectors: |
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