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Electron beam writer (E-Beam)
| Manufacturer: | Raith |
| Type: | EBPG 5200 |
| Year of manufacture: | 2017 |
| Emitter: | Schottky - field emission cathode |
| Acceleration voltage: | 20 kV, 50 kV or 100 kV |
- Equipment
- Research
- Technology
| Manufacturer: | Raith |
| Type: | EBPG 5200 |
| Year of manufacture: | 2017 |
| Emitter: | Schottky - field emission cathode |
| Acceleration voltage: | 20 kV, 50 kV or 100 kV |