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Nanostructuring and Clean Room Center Infrastructure

Working Group 2.44

Equipment

- Equipment
- Research
- Technology

Scanning electron microscope (SEM)

Php B Tqf7o

Manufacturer:	ZEISS
Type:	GeminiSEM 560
Year of manufacture:	2022
Beam energy:	max. 30 keV

Electron beam writer

Php Yu Ah Li

Manufacturer:	Raith
Type:	EBPG 5200
Year of manufacture:	2017
Beam energy:	20, 50 or 100 keV

Contact

Head of Working Group

Dr. Thomas Weimann

Phone: +49 531 592-2281
Email:
thomas.weimann(at)ptb.de

Address

Physikalisch-Technische Bundesanstalt
Bundesallee 100
38116 Braunschweig