Nanostructuring and Clean Room Center Infrastructure

There are two tasks of the Working Group. The first task is facility management of the clean room center of PTB. The second task is research and development in the field of nanostructuring and analytics with regard to the application of metallic and semiconductor thin film devices. For this purpose mainly electron-optical systems are used. Additional tasks are material research and high resolution electron microscopy and the support of other groups in the field of nanostructuring.

Due to the the ebeam-lithography the working group is involved in many research projects.

• Equipment