PTB-Reports Optik (Opt)
Publication single view
PTB-Opt-73 |
Statistical Approaches to the Inverse Problem of Scatterometry |
|---|---|
| Author(s): | |
| Editor: | Physikalisch-Technische Bundesanstalt |
| Report type: | PTB-Report |
| Year: | 2013 |
| ISBN: | 978-3-95606-063-2 |
| ISSN: | 0341-6712 |
| Note: | Dissertation |