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Report

Title: Statistical Approaches to the Inverse Problem of Scatterometry
Author(s): M.-A. Henn
Editor: Physikalisch-Technische Bundesanstalt
Report type: PTB-Report
Year: 2013
Document number: PTB-Opt-73
ISBN: 978-3-95606-063-2
ISSN: 0341-6712
Note: Dissertation

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