PTB-Reports Fertigungsmesstechnik (F)
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Report
| Title: |
3D Micro- and nanometrology : requirements and current developments ; Beiträge des 257. PTB-Seminars am 27. und 28. September 2010 |
| Author(s): |
H.-U. Danzebrink |
| Report type: |
PTB-Report |
| Year: |
2007 |
| Document number: |
PTB-F-55 |
| Pages: |
CD-ROM |
| ISBN: |
978-3-86918-103-5 |
| ISSN: |
0179-0609 |
| Note: |
3D Micro- and nanometrology : requirements and current developments ; Beiträge des 257. PTB-Seminars am 27. und 28. September 2010 |
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