Repairing thin-film sensors
PTBnews 1.2020
26.02.2020
Result of the electrothermal removal of a via
Thin-film sensors enable the high-precision and spatially resolved measurement of various physical states, especially in particularly small places that are difficult to access, and under harsh environmental conditions. In thin-film sensor production, possible defects such as vias caused by pinholes in the insulation are particularly unwelcome as they may make the thin-film sensors applied useless. PTB has developed a procedure in which existing defects are repaired by the electrothermal elimination of the vias between the sensor layer and the substrate. (Technology Offer 327)
Advantages
removing defects (pinholes)
securing functionality
simple post-processing