Polishing procedures for ultraprecise silicon spheres
Ultraprecise spheres exhibit form errors and roughness in the nanometer range. Their crystal surfaces are free of metallic contaminations and show no crystal structure damage. These properties place extremely high requirements on their manufacturing process. Through the use of a PTB invention, it is possible to produce spheres with small form errors (on the order of 20 nm) in a reproducible manner by an ultraprecise manufacturing procedure. The invention is based on a pivoting polishing tool equipped with a membrane bearing for optimized control of the polishing operation. (Technology Offer 0404)
small form errors on the order of 20 nm
average roughness values of less than 1 nm
Contact person for questions about technology transfer
Andreas Barthel
Phone: +49 (0)531 592-8307
andreas.barthel(at)ptb.de
www.technologietransfer.ptb.de/en