X-ray analysis for 450 mm wafers
PTB-News 1.2015
07.04.2015
Advantages
- comprehensive 450 mm wafer characterization in one tool with a 1 m2 footprint
- 2D scanning
- adjustment of the crystal orientation at any wafer location
- maximum reliability and reproducibility
Contact person for questions about technology transfer
Andreas Barthel,
Phone: +49 (0)531 592-8307,
andreas.barthel(at)ptb.de,
Technology Transfer