Contact person for questions about technology transfer
Andreas Barthel,
Telefon: (0531) 592-8307,
andreas.barthel(at)ptb.de,
www.technologietransfer.ptb.de
Marker structures are often used in industrial manufacturing to determine the relative position of two objects in relation to each other. By combining optical imaging and scatterometry, a new measurement method devised by PTB has reached a resolution of less than 1 nm for spatial overlapping and is particularly fast at doing so. For this purpose, marker structures are put into the focus of a laser, and the light these structures scatter is detected on a quadrant photodiode. If the structures overlap exactly, a symmetrical intensity distribution is yielded at the diode. Deviations from this are an exact measure of the quality of the overlapping. This method can be integrated into a measurement process by means of simple optical components. (Technology Offer 522)
resolution of a spatial overlapping < 1 nm
fast detection
easy integration
Andreas Barthel,
Telefon: (0531) 592-8307,
andreas.barthel(at)ptb.de,
www.technologietransfer.ptb.de