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EUV reflectometry

PTBnews 1.2021

PTB's close cooperation with ZEISS which has existed since 1998 is being extended until 2024.

At its Berlin-Adlershof site, PTB will continue to expand its measurement capabilities: In addition to wavelengths in the range of 13.5 nm (EUV), microscopic analysis methods are arising which use short wavelengths for semi-conductor technology, and in the future, also for further technological fields such as medical technology (“water windows” at 2.3 nm up to 4.4 nm). (Contact: Michael Kolbe, +49 30-3481 7131, Opens local program for sending emailmichael.kolbe(at)ptb.de)