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Hybrid microscope

PTB News 2.2021
Especially interesting for

dimensional metrology

manufacturers of interferometric microscopes

Die Rasterkraftmikroskopie steht vor der Herausforderung, dreidimensionale Strukturen schnell und präzise zu messen. Diese schnelle Inspektion auf größere Flächen auszudehnen ist Ziel eines neuen hybriden Messsystems. 

Interference fringe projected onto a cantilever

Atomic force microscopy (AFM) is faced with the challenge of fast measurements of 3D structures. Extending this rapid inspection to larger surfaces is the goal of a new hybrid measuring system. The new system developed by PTB integrates an AFM measuring facility into the setup of an interferometric optical microscope. This AFM facility can be switched away from or into the optical path of the microscope. The device measures fast and without contact in an optical way when the AFM is switched away from the optical path. Besides this, it measures with higher resolution in an AFM way when it is switched into the optical path. The special feature of this new system is that the interferometric measurement path simultaneously serves as the evaluation unit of the atomic force microscope. The system can thus be easily integrated into existing interferometric measuring instruments. (Technology Offer 511)


increased 3D resolution of interferometric microscopes

reduced measuring time

retrofitting into existing systems possible