Micro-coordinate measuring machines can measure the smallest toothed gears, injector nozzles or micro-channels for biochemical applications with measurement uncertainties clearly below 0.5 μm. The probing elements used in previous commercial systems were relatively expensive. PTB's 3D micro-probe is characterized by its nearly isotropic stiffness. It is manufactured with hybrid silicon technology (also using lithographic and micromechanical technologies). Hence, a large number of probes can be produced simultaneously, which reduces the production costs. Thanks to a novel exchanging device mounted on the probe heads, the micro-probes can be exchanged very easily and are characterized by short setup times, too.
Tactile probe for micro-coordinate measuring machines
Contact
Sebastian Bütefisch
Department 5.2 Dimensional Nanometrology
phone: +49 (0) 531 592-5119
e-mail: sebastian.buetefisch(at)ptb.de