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Tactile probe for micro-coordinate measuring machines

Licence partner wanted
Especially interesting for
  • micro-systems technology
  • coordinate measuring machines
Novel probe tip mounted on an exchangeable head

Micro-coordinate measuring machines can measure the smallest toothed gears, injector nozzles or micro-channels for biochemical applications with measurement uncertainties clearly below 0.5 μm. The probing elements used in previous commercial systems were relatively expensive. PTB's 3D micro-probe is characterized by its nearly isotropic stiffness. It is manufactured with hybrid silicon technology (also using lithographic and micromechanical technologies). Hence, a large number of probes can be produced simultaneously, which reduces the production costs. Thanks to a novel exchanging device mounted on the probe heads, the micro-probes can be exchanged very easily and are characterized by short setup times, too.