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Low-energy compact storage ring constructed in Berlin-Adlershof

In Berlin-Adlershof the PTB is constructing a low-energy compact storage ring optimized for metrological applications in the spectral region from the ultraviolet (UV) to the extreme UV (EUV).

Photon flux of the compact storage ring, compared with BESSY II

For 18 years, until its decommissioning in late 1999, the PTB had used the electron storage ring BESSY I in Berlin-Wilmersdorf for realizing and disseminating radiometric units in the UV and EUV regions. As a successor to this source, a compact storage ring with a tunable electron energy from 200 MeV to 600 MeV is at present being constructed by the PTB. It is built in close cooperation with the Berliner Elektronenspeicherring-Gesellschaft mbH (BESSY) at the scientific and economic site of Berlin-Adlershof and will form, together with the high-energy storage ring BESSY II, which has been used since 1999 by the PTB for X-ray radiometry, the European competence centre for metrology with synchrotron radiation.

After four years of construction, the facility will take up operation in 2007. It will be Europe's sole primary standard radiator for the UV and EUV regions and used not only by the PTB for its own purposes but also by other national metrology institutes. Furthermore, it serves to further speed up EUV lithography which according to the current “International Technology Roadmap for Semiconductors”will produce semiconductor structure widths of 65 nm beginning in 2007. According to the prognosis, the further development steps will yield structural widths of 22 nm in 2016. To achieve this, it is absolutely necessary to carry out “at-wavelength” measurements with 13 nm radiation. The compact storage ring thus is also of importance to optical industry which has a great interest in metrological support for the UV and EUV regions.

Contact at PTB:

Phone: +49-531-592-0