Towards ever larger wafers
European multisectoral project investigates the next generation of wafers 450 mm in diameter
28.09.2010
Contact:
Dr. Burkhard Beckhoff,
PTB Working Group 7.12 X-ray Spectometry,
Telephone: +49 (0) 030 6392-5091,
e-mail: burkhard.beckhoff(at)ptb.de