Tactile microprobe for micro-coordinate measuring machines
Measuring and calibrating by means of hybrid silicon technology at CONTROL 2011
28.04.2011
Contact at PTB:
Dr. Sebastian Bütefisch,
Working Group 5.25 Scanning Probe Metrology,
phone +49(0)531 592-5119,
e-mail: sebastian.buetefisch(at)ptb.de
Andreas Barthel,
Technology Transfer,
phone: +49(0)531 592-8307,
e-mail: andreas.barthel(at)ptb.de