How rough, how smooth, how hard, how deformable? Exact surface metrology is of great significance in many fields of research and production. It is, above all, in microsys-tems technology and in nanotechnology that geometric dimensions and surface proper-ties have to be measured with high precision. Scientists of the Physikalisch-Technische Bundesanstalt (PTB) have developed an entire portfolio of MEMS-based surface meas-uring devices, with which it is possible to measure the smallest path length changes and forces in a simple way. Today, MEMSs (Micro Electro Mechanical Systems) are em-ployed a millionfold, for example in automotive engineering. These MEMSs will also be used now for the first time for ultraprecision sensor systems. The MEMS-based surface measuring devices can be viewed from 7 to 9 June 2011 at the Nuremberg trade fair SENSOR + TEST 2011 in Hall 12, Stand 376.
Contact at PTB:
Dr. Uwe Brand,
Arbeitsgruppe Härte- und Schichtdickenmesstechnik,
Tel.: (0531) 592-5111,
E-Mail: uwe.brand(at)ptb.de
Dr. Bernhard Smandek,
Technologietransfer,
Tel.: (0531) 592-8303,
E-Mail: bernhard.smandek(at)ptb.de