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Smallest surface sensors using MEMS technology

Micro- and nanoforce sensors at the SENSOR + TEST 2011 in Nuremberg


How rough, how smooth, how hard, how deformable? Exact surface metrology is of great significance in many fields of research and production. It is, above all, in microsys-tems technology and in nanotechnology that geometric dimensions and surface proper-ties have to be measured with high precision. Scientists of the Physikalisch-Technische Bundesanstalt (PTB) have developed an entire portfolio of MEMS-based surface meas-uring devices, with which it is possible to measure the smallest path length changes and forces in a simple way. Today, MEMSs (Micro Electro Mechanical Systems) are em-ployed a millionfold, for example in automotive engineering. These MEMSs will also be used now for the first time for ultraprecision sensor systems. The MEMS-based surface measuring devices can be viewed from 7 to 9 June 2011 at the Nuremberg trade fair SENSOR + TEST 2011 in Hall 12, Stand 376.

Spitze des Nanoindentors. Die Kugel hat einen Durchmesser von 100 µm.

Contact at PTB:
Dr. Uwe Brand,
Arbeitsgruppe Härte- und Schichtdickenmesstechnik,
Tel.: (0531) 592-5111,
E-Mail: uwe.brand(at)ptb.de

Dr. Bernhard Smandek,
Tel.: (0531) 592-8303,
E-Mail: bernhard.smandek(at)ptb.de