EUV reflectometry
PTBnews 1.2021
07.01.2021
At its Berlin-Adlershof site, PTB will continue to expand its measurement capabilities: In addition to wavelengths in the range of 13.5 nm (EUV), microscopic analysis methods are arising which use short wavelengths for semi-conductor technology, and in the future, also for further technological fields such as medical technology (“water windows” at 2.3 nm up to 4.4 nm). (Contact: Michael Kolbe, +49 30-3481 7131, michael.kolbe(at)ptb.de)