Logo der Physikalisch-Technischen Bundesanstalt

Stand-alone EUV spectrometer for the characterization of ultrathin films and nanoscale gratings

Kolloquium der Abteilung 7


In this talk the implementation, measurement procedure and the data analysis of a stand-alone EUV spectrometer is presented. The setup is used to determine optical constants and dimensional characteristics of samples, e. g. ultrathin films or nanoscale gratings, reconstructed from measurements of their broadband EUV reflectance at variable grazing incidence angles.



Uhrzeit: 6.Nov.2020 10:00 AM Amsterdam, Berlin, Rom, Stockholm, WienZoom-Meeting beitreten


Meeting-ID: 814 8734 3502

Schnelleinwahl mobil

+12532158782,,81487343502# Vereinigte Staaten von Amerika (Tacoma)

+13017158592,,81487343502# Vereinigte Staaten von Amerika (Germantown)