Reference-free X-Ray Fluorescence analysis (XRF)

Brief description of the Method

X-ray Fluorescence (XRF) analysis is based on the element specific emission of radiation upon ionization by removal of inner shell electrons. A quantitative XRF analysis requires the accurate knowledge of all experimental parameters both in the excitation and detection channels as well as of the atomic fundamental parameters involved. At PTB, the experimental parameters are well known due to the usage of calibrated instrumentation [1] (see fig. 1). This enables a reference-free quantitative XRF analysis, which is physically traceable to the SI unit system. Relevant atomic fundamental parameters can be experimentally determined or obtained from tabulated data sets.

The decisive advantage of reference-free XRF – as developed by PTB – is that it is absolutely independent of suitable calibration standards and reference materials, as these are often not available or would have to be developed and certified with great effort [1].

Expertise

• Completely reference-free quantitative analysis [1]

Applications

• Quantitative thin layer characterization
• Compositional analysis of bulk samples

Research Highlights

• Thickness determination for nanolayers [2,3]
• Depth profiling of implants [4] and nanolayers
• Contamination analysis [5,6]