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Übersichtsartikel: Quantitative Mikroskopie und dimensionale Nanometrologie

Publikations Einzelansicht

Beitrag zu Tagungsband

Titel: Nanometrology at PTB
Autor(en): H. Bosse, B. Beckhoff, B. Bodermann, U. Brand, M. Bug, E. Buhr, G. Dai, H.-U. Danzebrink, T. Dziomba, V. Ebert, G. Ehret, A. Felgner, J. Fluegge, C. G. Frase, S. Gao, H. Gross, B. Guettler, G. Hilgers, P. Hoenicke, A. Jordan-Gerkens, A. Kato, T. Klein, L. Koenders, M. Kolbe, R. Krueger-Sehm, M. Krumrey, U. Kuetgens, R. Meess, M. Mueller, V. Nesterov, H. Nettelbeck, A. Nowak, B. Pollakowski, H. Rabus, F. Reinhardt, F. Scholze, M. Schulz, H. W. Schumacher, T. Schurig, S. Sievers, U. Steinhoff, R. Stosch, L. Trahms, T. Weimann, J. Weser, S. Wundrack, M. Wurm, F. Yaghobian, S. Zakel
Jahr: 2011
Buchtitel: CIMM-PTB Seminar on Dynamic Measurements and Nanometrology : proceeding of CIMM-PTB Seminar 2011
Seite(n): 107-125
Veranstaltungsname: CIMM-PTB Seminar on Dynamic Measurements and Nanometrology
Veranstaltungsort: Beijing, China
Veranstaltungsdatum: 10-13, May, 2011
Zusammenfassung: The paper provides a survey about the activities of the PTB in support of nanotechnology. As the metrology institute of Germany, the main target of the related PTB work is directed at the establishment of traceability of measurements of objects with dimensions at the nanoscale at the respective required levels of uncertainty. The different areas of PTB activities in nanometrology will be described and some examples will be explained in more detail.Structure of the paper:1. Bosse, Harald: Introduction2. Jordan Gerkens, A.; Buhr, E.; Klein, T.; Frase, C. G.; Krumrey, M.; Dziomba, Th.; Nowak, A.; Ebert, V.: Characterization of nanoparticles3. Sievers, S.; Schumacher, H.-W.; Steinhoff, U.; Trahms, L.; Schurig, Th.: Magnetic nanoparticles and nanostructures4. Bug, M.; Hilgers, G.; Nettelbeck, H.; Rabus, H.: Nanodosimetry5. Stosch, R.; Zakel, S.; Yaghobian, F.; Wundrack, S.; Weimann, Th.; Güttler, B.: Surface enhanced Raman scattering: an example for the use of nanostructures for metrology6. Ehret, G.; Schulz, M.; Brand, U.; Koenders, L.; Krüger-Sehm, R.; Dziomba, Th.; Dai, G.; Felgner, A.; Meeß, R.: Surface characterization of the nanoscale7. Bodermann, B.; Wurm, M.; Dai, G.; Danzebrink, H.-U.; Frase, C. G.; Flügge, J.; Gross, H.; Kato, A.; Scholze, F.: Characterization of lithographic nanostructures8. Material characterization at the nanoscale:8.1 Beckhoff, B.; Hönicke, P.; Kolbe, M.; Müller, M.; Pollakowski, B.; Reinhardt, F.; Weser, J.: Synchrotron radiation used for material specific analysis in nanometrology8.2 Nesterov, V.; Brand, U.: Nanoforce metrology9. Koenders, L.; Dai, G.; Dziomba, T.; Felgner, A.; Flügge, J.; Kuetgens, U.: Crystal lattices used for nanometrology10. Summary and outlook

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