Publikations Einzelansicht
Beitrag zu Tagungsband
Titel: | Towards nanoscopy - optical metrology of nanostructures |
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Autor(en): | B. Bodermann, E. Buhr, G. Ehret, Z. Li, F. Scholze, M. Wurm |
Jahr: | 2009 |
Buchtitel: | 4th EOS Topical Meeting on Advanced Imaging Techniques |
Seite(n): | 40-41 |
Veranstaltungsname: | 4th EOS Topical Meeting on Advanced Imaging Techniques |
Veranstaltungsort: | Jena, Germany |
Veranstaltungsdatum: | 10-12, June 2009 |
ISBN: | 978-3-00-024189-5 |
Zusammenfassung: | Many different approaches are currently investigated and developed to enable optical metrology for the challenges of nanotechnology. We will give a brief review over different approaches with an emphasis on latest developments at the PTB. |