Referenzen
Precision Micro- and Nano-Metrology for Nanomanufacturing ; in: International Journal of Nanomanufacturin 8(1/2), 4-22 ( 2016) | |
Technisches Messen 82(7/8), 346-358 ( 2015) | |
58th IWK - Ilmenau Scientific Colloquium: Shaping the Future by Engineering, Ilmenau, Germany, 08-12,September, 2014
58th IWK, Ilmenau Scientific Colloquium: Proceeding
(2014)
, Seite 15
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PTB-Mitteilungen: 121 (2), 152-164 ( 2011) | |
Measurement 2011, 8th International Conference on Measurement, Smolenice, Slovakia, 27-30, April, 2011
Measurement 2011 : proceedings of the 8th International Conference on Measurement
(2011)
, Seite 95-106
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CIMM-PTB Seminar on Dynamic Measurements and Nanometrology, Beijing, China, 10-13, May, 2011
CIMM-PTB Seminar on Dynamic Measurements and Nanometrology : proceeding of CIMM-PTB Seminar 2011
(2011)
, Seite 107-125
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4th EOS Topical Meeting on Advanced Imaging Techniques, Jena, Germany, 10-12, June 2009
4th EOS Topical Meeting on Advanced Imaging Techniques
(2009)
, Seite 40-41
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Optoelectronics Letters: 4 2, 81-85 ( 2008) | |
9th International Symposium on Laser Metrology, Singapore, 30, June - 02, July, 2008
(2008)
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Advanced Lithography 2007, San Jose, USA, 25, February - 02, March, 2007
Proceedings of SPIE
Band 6518
(2007)
, Seite 65181X-1 - 65181X-11
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GMA-Fachtagung "Messtechnik für Mikro- und Nano-Engineering"^, Erlangen, Germany, 29-30, November, 2006
Messtechnik für Mikro- und Nano-Engineering : Tagung Erlangen, 29. und 30. November 2006
(November2006)
, Seite 99-108
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6th international conference, European Society for Precision Engineering and Nanotechnology, Vienna, Austria, May 28th - June 1st, 2006
Proceedings of the 6th international conference, European Society for Precision Engineering and Nanotechnology EUSPEN
Band 1
(2006)
, Seite 374 - 377
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