| Titel: |
Dimensional micro- and nanometrology at PTB |
| Autor(en): |
R. Koening, J. Fluegge, D. Hueser, W. Haessler-Grohne, H.-U. Danzebrink, G. Dai, U. Brand, V. Nesterov, S. Buetefisch, G. Ehret, M. Wurm, B. Bodermann, E. Buhr, H. Bosse |
| Jahr: |
2011 |
| Buchtitel: |
Measurement 2011 : proceedings of the 8th International Conference on Measurement |
| Seite(n): |
95-106 |
| Veranstaltungsname: |
Measurement 2011, 8th International Conference on Measurement |
| Veranstaltungsort: |
Smolenice, Slovakia |
| Veranstaltungsdatum: |
27-30, April, 2011 |
| ISBN: |
978-80-969672-4-7 |
| Zusammenfassung: |
In this contribution we will provide an overview of the current state and the actually ongoing developments in the field of dimensional micro- and nanometrology at PTB. That is, we will report on the methods and instruments developed, applied and that are in development for high precision, traceable measurements in these important areas of dimensional metrology. |
