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Form- und Wellenfrontmetrologie

Arbeitsgruppe 4.21

Arbeitsthema: Formmessung an gekrümmten Oberflächen: Traceable Multiple Sensor - Methoden (TMS)

    [1]   I. Weingärtner, C. Elster (2004). System of four distance sensors for high-accuracy measurement of topography. Precis. Eng. 28, 164-170.

    [2]   M. Schulz, C.Elster (2006). Tracable multiple sensor system for measuring curved surface profiles with high accuracy and high lateral resolution. Opt. Eng. 45, 060503.

    [3]   C. Elster, I. Weingärtner, M. Schulz (2006). Coupled distance sensor systems for high-accuracy topography measurement: Accounting for scanning stage and systematic sensor errors. Precis. Eng. 30, 32-38.

    [4]   M. Schulz, A. Marquez, A.Wiegmann, C. Elster (2008). Direkte Kalibrierung flächenmessender Interferometer mit dem TMS-Verfahren. DGaO Proceedings 2008.  [download pdf (921KB)] (in german)

    [5]   A. Wiegmann, C. Elster, M. Schulz, M. Stavridis (2008).  Absolute Topographievermessung gekrümmter optischer Oberflächen mit hoher lateraler Auflösung. DGaO Proceedings 2008. [download pdf (872KB)] (in german)

    [6] A. Wiegmann, M. Schulz, and C. Elster (2010). Improving the lateral resolution of a multi-sensor profile measurement method by non-equidistant sensor spacing. Opt. Express  18, 15807-15819.
    download link: http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-18-15-15807

    [7] A. Wiegmann, M. Schulz and C. Elster (2008). Absolute profile measurement of large moderately flat optical surfaces with high dynamic range. Opt. Express 16, 11975-1198. [download pdf (627KB)]