PTB-Berichte Fertigungsmesstechnik (F)
Publikations Einzelansicht
Bericht
| Titel: |
Proceedings of the 4th Seminar on Quantitative Microscopy QM 2000 : dimensional measurements in the micro- and nanometre range, applications, challenges, state-of-the-art |
| Autor(en): |
W. Mirandé, C. G. Frase und H. Bosse |
| Editor: |
Hasche, Klaus; 5, Fertigungsmesstechnik, PTB-Braunschweig
Mirandé, Werner; 4.22, Bildanalyse, PTB-Braunschweig
Wilkening, Günter; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig |
| Report Typ: |
PTB-Report |
| Jahr: |
2000 |
| Dokument Nummer: |
PTB-F-39 |
| Seite(n): |
230 |
| Verschiedenes: |
24,00 EUR |
| DOI: |
ISSN 0179-0609 |
| ISBN: |
ISBN: 978-3-89701-503-6 |
| Zusammenfassung: |
In this work we present a process for the production of calibration chips containing submicron structures made from plastic by injection molding, using an adapted molding process commonly used for the production of compact discs (CDs). The CD molding tool was modified by inserting a silicon wafer which had been structured with regular test-patterns with grating periods down to 120 nm by electron-beam lithography. Hundreds of CDs carrying replicas of the test pattern were molded on an automatic injection molding machine with cycle times down to 10s. |
| Bemerkung: |
Proceedings of the 4th Seminar on Quantitative Microscopy QM 2000 : dimensional measurements in the micro- and nanometre range, applications, challenges, state-of-the-art ; (PTB-Bericht PTB-F-39) |
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