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| Review of the Annual Report 2008 |
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Fundamentals of Metrology |
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| Development of a nanoindenter on the basis of MEMS |
A miniaturized nanoindenter which is based on a microelectromechanical system (MEMS) enables in-situ measurements of the mechanical properties of plastics and metals.
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| Ellipsometric determination of the oxide layer thickness of AVO-28#8 |
Ellipsometric measurements were carried out on the isotope-pure 28Si sphere of the Avogadro project. The mean layer thickness of the native oxide layer was determined on the basis of about 1600 individual measurements.
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| Realization of the nanotensile test on ultrathin layers |
With a nanotensile test system which is based on a microelectromechanical system (MEMS), it is possible to determine the tensile properties of freestanding layers with a thickness in the nanometer range.
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| Influence of the optical system of the sphere interferometer on the diameter determinations of silicon spheres |
By means of the sphere interferometer of PTB it is - due to the two-dimensional field of view - possible to investigate the influence of the optical system on the measured sphere diameter values. Respective measurement series have been carried out, but no significant contributions to the measurement results of the sphere diameters were found.
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| Interferometry for geodetic lengths |
An improved method of two-colour interferometry for compensation of the influence of the refractive index of air was used for length measurements up to 50 m and will, within the framework of an EC-cooperation, be extended to lengths of up to 1 km. Measurements of air pressure and air humidity allow the air temperature to be calculated from the lengths measured with the two colours.
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| New ultraprecision interferometer for length measurements of prismatic objects |
Compared to the established PTB precision interferometer, the new ultraprecision interferometer for length measurements of prismatic objects offers several measurement advantages, amongst others the realization of the fast DFT procedure for phase evaluation of the interference images.
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| Converter foils for the orbital project “AIDA” |
As part of a feasibility study for a DLR-project on the calorimetric measurement of orbital particles, a fabrication method has been developed by which thin Au-foils (50 µm) can be structured by means of a laser and precision robotics.
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| Development of a fabrication method for the orbital project “Microscope” |
The Scientific Instrumentation Department is currently developing a course of fabrication to manufacture test masses for the ESA project “Microscope” for the validation of the Equivalence Principle with an uncertainty of 10-15.
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Metrology for Economy |
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| Development of a compact SPM sensor head |
In a collaboration with the Nanoscience Laboratory in Taipei, Taiwan, a compact scanning probe microscope (SPM) head has been developed which is based on the cantilever detection of a DVD optical head and can be operated in both the "contact" and the "intermittent contact" mode as well as in a fast optical profilometer mode.
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| Guideline for basic calibration of scanning probe microscopes |
A guideline for the calibration of scanning force microscopes (VDI/VDE 2656 sheet 1) is available. It describes the procedures for the characterization of scanning force microscopes and their calibration via standards with respect to the application of geometrical quantities. The guideline was developed in cooperation with experts from industry and research in the VDI-GMA 3.41 Committee “Geometrical Measurands, Standards, Calibration”.
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| Piezoresistive roughness sensors for measurement inside of injection nozzles |
Within the scope of a BMBF joint research project, piezoresistive silicon sensors for measurement in injection nozzles with smallest diameters of 60 µm have been developed and successfully tested in industrial use.
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| Characterisation of a newly developed probe system for combined contour and roughness measurements |
For the investigation of the metrological properties of a high-resolution tactile probe system for combined contour and roughness measurements of the company Hommel-Etamic, which is based on an angle measurement system, a measurement principle was developed by PTB which avoids the typical eccentricity errors normally present in angle measurements.
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| Contrast simulations on alignment marker structures for electron beam lithography |
Within the scope of a joint project with an industrial partner, contrast simulations of the backscattered electrons on specially designed marker structures were performed which are used in electron beam lithography for precise wafer positioning in direct write applications.
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| Metrology for new measurement techniques in industry |
The “Coordinate Metrology” Department coordinates a new European research project named “Metrology for New Indus-trial Measurement Technologies” (NimTech). In cooperation with four other metrology institutes it will be investigated in which way the traceability of new measurement systems for mobile and flexible measurement of larger structures with dimensions of up to several 10 meters can be assured directly in the production environment.
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| Technology transfer of the 3D-microprobe to industry |
The 3D tactile-optical microprobe, which was developed by PTB, has been successfully transferred to industry and presented at the trade fair CONTROL 2008. The image analysis algorithms for evaluation of the characteristic speckle patterns were accelerated in such a way that the probe can now also be used for scanning measurements.
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| “VCMM-Gear” — Automated determination of the measurement uncertainty in gear metrology |
For determining the task-specific measurement uncertainty of 3D gear measurements, the VCMM method (Virtual CMM) established in coordinate measurement was extended by the gear-specific influence parameters such as rotary table, clamping and scanning, and adapted. First comparison measurements have furnished plausible results.
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| 3D micro measurements of highest accuracy |
A new micro-coordinate measuring machine was investigated with respect to its performance for measurements on micro parts with exterior and interior geometries and for form measurements by means of suitable reference standards. The results showed very good agreement with the reference values within the range of 100 nm and, particularly for form measurements, also below.
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| Form and diameter measurements on thin cylinders by diode laser interferometry |
A measurement method for non-contacting, non-scanning form measurement of thin cylinders by means of multi-wavelength interferometry is being developed. First results show that by means of this method, the surface of thin cylinders can be measured with a resolution of a few nanometers.
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| Apparatus for the determination of friction forces in miniaturized rolling element guideways |
A newly developed apparatus for the determination of friction forces allows the investigation of the frictional behaviour of miniaturized linear bearings over a wide range of velocities and displacements.
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Metrology for Society |
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| New procedures for log wood measuring machines within the scope of length measurements subject to legal control |
In view of the increasing requirements in the rationalisation and optimisation of the utilization of the raw material “wood”, the manufacturers of log wood measuring machines intend to break new ground. A new method known under the keywords “rotating gripper” or “full-contour measurement” has been tested by PTB.
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| Construction and fabrication of a photon irradiation facility |
In cooperation with Department 6.3, “Radiation protection dosimetry”, a 120kV photon irradiation facility was designed and manufactured which allows a defined irradiation of measuring devices (area and personal dosimeters) for calibration and type approval within the scope of radiation protection and the realization of photon reference radiation fields.
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International Affairs |
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| Bilateral comparison on 50 nm and 100nm gratings |
In a bilateral comparison on 1D gratings with a pitch of 100 nm and 50 nm by means of scanning probe microscopy a very good agreement with the results of the national metrology institute of Japan, the NMIJ, was achieved. The deviations of the mean pitches determined by scanning probe microscopes were smaller than 30 pm.
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Prize for PTB Nanometrologist
Thorsten Dziomba is awarded the first prize at Euro-Asian competition |
Thorsten Dziomba, a young scientist in Department 5.1 ”Nano- and Micrometrology”, has been awarded the title The Best Young Metrologist of COOMET . His presentation convinced the high-ranking committee, among them the presidents of several national metrology institutes (NMIs) of COOMET.
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| International comparison on angle standards |
The international comparison measurement CCL-K3 on an optical polygon and 4 angle gauge blocks was finished successfully. The measurement results of the PTB were in good agreement with the reference values. For the polygon the measurement uncertainty quoted by the PTB was Uk=2 = 0.03”, the smallest uncertainty of all 13 participating metrology insti-tutes.
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| Archive of scientific news |
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