Research projects

Projects with partners from industry

Running projects

• "Investigation of special materials to be used in EUV-Lithography". Project with SEMATECH INTERNATIONAL,
  Heads of project: R. Schödel, A. Abou-Zeid PTB, since 6/2004
  
  In this project new materials are investigated with respect to thermal expansion properties.
  This regards high accuracy measurements of the CTE as well as homogeneity of thermal expansion. The software used to extract information from the interference phase maps was extended so that three samples can be measured at the same time. In addition, a correction regarding temperature dependent effects due to a possible deformation of the end plate / optics error can be extracted.

Completed projects

• "Scientific cooperation in the area of long-term stability of glass ceramics". Project with OHARA inc., Japan, Heads of project: R. Schödel, A. Abou-Zeid PTB, 08/2005-08/2006
  
  This project investigated the stability of different manufactured glass ceramics. Besides this primary point, it is investigated which material is appropriate for continuative investigations regarding measurements of gas refractivities using "length refractometry".
  (see: Length refractometer)

• "Sample preparation effects in measurements of thermal expansion properties".
  Project with Berliner Glas KgaA, Heads of project: R. Schödel, A. Abou-Zeid PTB, 12/2003-12/2005.
  
  In this project the influence of sample treatments during manufacturing with respect to thermal expansion properties was investigated. For this purpose procedures have been developed allowing sub-nm comparability of measurement results obtained before after treatment.

• "Device for measurements of thermal expansion coefficients (CTE) of highly stabile materials for EUV-Lithography". Project with Zeiss SMC und Schott, Heads of project: U. Sterr und R. Schödel PTB, 01/2003-12/2004.
  
  This project consisted in two parts: 1) Setup of an apparatus for measurements of thermal expansion basing on Fabry-Pérot resonators (responsible: U. Sterr) to be transferred to Zeiss and 2) comparative measurements at PTB's Precision Interferometer in order to validate the device. For this purpose a new measurement software had to be developed which is able to extract the length of the cylindrically shaped resonators as a function of the temperature with sub-nm uncertainty. Besides CTE-measurements, the temperature induced flexing effect of the end plates that are attached to the resonators was investigated at the Precision Interferometer. This together with the results of CTE comparisons lead to the conclusion that the effect of temperature induced mirror bending cannot be excluded in the resonator method.

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