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| Department 5.3 |
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Coordinate Metrology
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Modular Multisensor system for 3D Measurement of Microparts (MODUS)
The joint research project "Modular multisensor system
for 3D measurement of microparts (MODUS)" is supported by the Federal Ministry
of Education and Research (BMBF) in the framework "Measurement and Testing Technology
for the Test of Microsystems (MSTPrüf)".
The goal of the PTB in the MODUS project is the
development of standards and procedures for the 3D measurement of microparts.
Traceable high-precision measurements at microparts (structure sizes from
approx. 25 µm to 0,5 mm) shall be facilitated under production conditions. The
activities in the project are:
- Concepts, manufacture
and test of 3D microstandards
- standards to evaluate
sensor properties and to calibrate the sensor position relative to other
sensors (balls, cylinder, cubes)
- component-like
standards (e.g. flanks of gears, components of fiber- and microoptics)
- Development and test of
procedures to calibrate these standards
- Increase of the
precision of multisensor systems and estimation of the measurement
uncertainty by simulation and intelligent combination of measurement
values
- Development and test of
measurement strategies for high precision tactile-optical 3D measurements
(intended uncertainty: 100 nm)
- Implementation of the
results in standards and guidelines
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