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TasksThe main tasks of the department
are to develop and to optimize measurement methods, standards and instrumentation
in the area of dimensional nanometrology and to disseminate dimensional measurands
by calibration of suitable micro- and nanostructured measurement objects.
The existing equipment allows to perform high precision measurements on micro-
and nanostructured measurement standards, material measures and dimensional
measuring systems with uncertainties in the nanometre region. This also holds
for angle measuring systems and angle material measures, which can be
characterized with uncertainties in the nanoradian region. In addition,
the department is involved in several research projects in the area of
nanometrology.
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| - | 5.21 | Length Graduation | |
| - | 5.22 | Mask Metrology | |
| - | 5.23 | Angle Metology | |
| - | 5.24 | Modeling Scanning Microscopy | |
| - | 5.25 | Scanning Probe Metrology |
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Head of Department |
Dir. u. Prof. Dr. Harald Bosse Phone: +49 (0)531 592-5200 
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Secretariat |
Christina Müller Phone: +49 (0)531 592-5201 Fax: +49 (0)531 592-5205 
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Address |
Physikalisch-Technische Bundesanstalt Fachbereich 5.2 Bundesallee 100 38116 Braunschweig Germany |
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