Working Group 5.25

Scanning Probe Metrology

Calibration services and Measurement standards in the scanning probe microscopy

• Development of standards for scanning probe microscopy
• Calibration of scanning probe microscopes as soon as whose standards
  • Directive for the basic calibration of scanning probe microscopes
  • Calibration of standards as flatness-, step height-, 1D- und 2D-lateral standards and combination standards for scanning probe microscopy
• Self calibration and error analysis for scanning probe microscopes