Physikalisch-Technische Bundesanstalt (PTB), Working Group 5.22

Arbeitsgruppe 5.22

Mask Metrology

Dr. rer. nat. Harald Bosse
Head of section
Tel.: +49 531 592-5200
Dr. rer. nat. Carl Georg Frase
Scanning electron microscopy, Monte-Carlo Simulations, basic investigations
Phone: +49 531 592-5186
Dipl.-Phys. Wolfgang Häßler-Grohne
Mask calibrations, special measurement tasks, development of procedures and instrumentation
Phone: +49 531 592-5112
Dipl.-Ing. (FH) Kai Hahm
Software development, development and optimisation of instrumentation
Phone: +49 531 592-5189
Dipl.-Ing. (FH) Bernd Przebierala
Mask calibrations, Finite-element calculation of mask bending, construction of instrumentation
Phone: +49 531 592-5114
Karsten Fromm
Construction, production and test of mechanical components for instrumentation
Phone: +49 531 592-5106
Dipl.-Phys. Klaus-Dieter Katzer
Development AFM
Phone: +49 531 592-5184
Dr. habil. Dorothee Hüser
Development 300 mm AFM
Phone: +49 531 592-5180
Dipl.-Phys. Dominic Gnieser
Scanning electron microscopy simulation
Phone: +49 531 592-5113

Note: Further staff is working occasionally within section 5.22, e.g. for development of electronic devices.

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