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Calibration services of section 5.221D- and 2D-precision graduations:
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Measurand / measurement object |
Measurement procedure/Measaurement device |
Measurement range |
Measurement uncertainty (k=2) |
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Graduation length of line scales |
LMS 2020 |
Up to 280 mm |
Q[10; 0,15L] in nm;L in mm |
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Graduation length of microscope scales |
LMS 2020 |
Up to 10 mm |
50 nm |
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2D-positions of microstructures on masks |
LMS 2020 |
Up to 200 mm |
Q[10; 0,2L] in nm; L in mm |
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Deviations from nominal grid positions of microstructures on masks |
LMS 2020 |
Up to 200 mm |
10 nm |
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Width of microstrucures, measured with optical detection in reflection mode |
LMS 2020 |
> 0,5 µm |
> 50 nm |
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Width of microstructures, SEM measurement |
EOMS |
> 0,1 µm |
> 20 nm |
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Mean pitch of microstructure graduations |
EOMS |
Mean pitch > 100 nm |
> 1 nm |
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© Physikalisch-Technische Bundesanstalt Page created: 2003-07-01, last update: 2007-09-18 |