Physikalisch-Technische Bundesanstalt (PTB), Working Group 5.22

	PTB > Strukture > Division 5 > Department 5.2> Working Group 5.22
	Deutsche Fassung

Arbeitsgruppe 5.22

Mask Metrology


	-		Masks in Lithography
	-		Research Items
	-		Instrumentation
	-		Calibration Services
	-		Literature
	-		Staff/Contact

Tasks

Development of measuring instruments and procedures for the determination of the position of microstructureson 2D-substrates
Investigation and improvement of optical and electron-optical measuring procedures for the localization of microstructure edges
Calibration of photomasks, microscope scales, line scales and other graduations on planar measurement objects

Contact

Head of Working Group		Dr. Harald Bosse Phone: +49 531 592-5200 Fax: +49 531 592-5205

Secretariat		Christina Müller Phone: +49 531 592-5201 Fax: +49 531 592-5205

Address		Physikalisch-Technische Bundesanstalt Arbeitsgruppe 5.22 Bundesallee 100 38116 Braunschweig Germany

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Page created: 2004-04-26, last update: 2007-09-26, D. Hüser