Physikalisch-Technische Bundesanstalt (PTB), Working Group 5.21

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Working Group 5.21

Length Graduation


	-		The Nanometer Comparator
	-		Contact persons

Tasks

Implementation and optimization of the Nanometer Comparator for the one-dimensional Calibration of photo masks, line scales and length measurement systems, like incremental displacement sensors and laser interferometers. The comparator can also be used for fundamental investigations of one-dimensional length measurement systems .

Contact

Head of Working Group		Jens Flügge, Ph.D. Phone: +49-531-592-5261 Fax: +49-531-592-5205 E-Mail: jens.fluegge@ptb.de

Secretariat		Christina Müller Phone: +49 (0)531 592-5201 Fax: +49 (0)531 592-5205 E-Mail: christina.mueller@ptb.de

Address		Physikalisch-Technische Bundesanstalt Arbeitsgruppe 5.21 Bundesallee 100 38116 Braunschweig Germany