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Working Group 5.15

Calibration of Roughness Parameters


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Publications 

2006   2005   2004   2003   2002   2001   2000 und davor  

2006
  • Krüger-Sehm, R.; Seewig, J.: Messunsicherheit bei der Bestimmung von Rauheitskennwerten mit Tastschnittgeräten, Messunsicherheit praxisgerecht bestimmen: Grundlagen, Praxisbeispiele, VDI-Berichte: 1947, 2006
  • Shaleev, M. V.; Dziomba, T.; Krüger-Sehm, R.: Ge(Si) self-assembled islands as possible topography standards on the nanometre scale, ohne schriftliche Quelle: no written source, 2006
  • Bakucz, P.; Krüger-Sehm, R: Wavelet filtering with ISO /TS 16610-29, MicroCAD 2006 : international scientific conference, 16 - 17 March 2006, 2006
  • Bakucz, P.; Krüger-Sehm, R: Morphological filter based investigation of influence of tip size on roughness measurements, MicroCAD 2006 : international scientific conference, 16 - 17 March 2006, 2006
2005
  • Krüger-Sehm, R.: Comparison of methods for the determination of the aperture correction of interference microscopes, Nano- and Micrometrology : 16 - 17 June 2005, Munich, Germany ; (Proceedings of SPIE: 5858) (2005)
  • Krüger-Sehm, R.; Dziomba, T.; Dai, G.: Investigations of nanoroughness standards by scanning force microscopes and interference microscope, Nanoscale calibration standards and methods: dimensional and related measurements in the micro- and nanometer range (2005)
  • Krüger-Sehm, R.; Frühauf, J.; Dziomba, T.: Determination of the short wavelength cutoff of interferential and confocal microscopes, Proceedings of the 10th International Conference on Metrology and properties of engineering surfaces ; July 4 - 7, 2005, Saint-Etienne, France (2005)
2004
  • M. Greve, R. Krüger-Sehm: Direct determination of the numerical aperture correction factor of interference microscopes, Proceedings of the XI. Int. Coll. on Surfaces, Chemnitz, 2.-3.02.2004, p. 156-163, ISBN 3-8322-2418-1
  • R. Krüger-Sehm, T. Dziomba, G. Dai: Profile assessment of nano-roughness standards by contact and non-contact methods, Proceedings of the XI. Int. Coll. on Surfaces, Chemnitz, 2.-3.02.2004, p. 31-40, ISBN 3-8322-2418-1
  • R. Krüger-Sehm, W. Häßler-Grohne, J. Frühauf: Traceable calibration standard for the lateral axis of contact stylus instruments, IX. Int. Conf. on Metrology and Properties of Engineering Surfaces, 10.-11.09.2003, Halmstad, Sweden, Wear,Vol 257 (2004), 12, pp 1241-1245
  • Thomsen-Schmidt, P., Krüger-Sehm, R., Wolff, H.: Development of a new stylus contacting system for roughness measurement, Proc. XI. Int Coll. on Surfaces part 2, Chemnitz, 02. -03.02.2004, S. 79 -86, ISBN 3-8322-2419-0
  • L. Jung, B. Spranger, R. Krüger-Sehm, M. Krystek: Reference software for roughness analysis-features and results, Proc. XI. Int Coll. on Surfaces part 2, Chemnitz, 02. -03.02.2004, S. 164-170, ISBN 3-8322-2419-0
  • Tyrrell, J.W.G.; Dal Savio, C.; Krüger-Sehm, R.; Danzebrink, H.-U.: Development of a combined interference microscope objective and scanning probe microscope, Rev. Sci. Instrum. 75 (2004), 4, 1120-1126
  • Krüger-Sehm, R.; Brand, U.; Greve, M.: Depth setting standards and an interference microscope for a measuring range up to 100 μm, Proceedings of the 9th International Conference on Metrology and Properties of Engineering Surfaces, 2004
  • Danzebrink, H.-U.; Tyrell, J. W. G.; Dal Savio, C.; Krüger-Sehm, R.: Combined interference and scanning force microscope, Optical metrology in production engineering, Proceedings of SPIE: 5457, 2004
  • Dai, G.; Jung, L.; Pohlenz, F.; Danzebrink, H.-U.; Krüger-Sehm, R.; Hasche, K.; Wilkening, G.: Measurement of micro-roughness using a metrological large range scanning force microscope, Measurement Science and Technology, 2004
  • Krüger-Sehm, R.: Richtlinie zur Kalibrierung von Interferenzmikroskopen, Optische 3D-Meßtechnik für die Qualitätssicherung in der Produktion : Seminar 365904 am 01. - 02. Juli 2004 im Fraunhofer-Allianz Vision beim Fraunhofer IPT, Aachen, 2004
  • Brand, U.; Krüger-Sehm, R.; Frühauf, J.; Krönert, S.: Reachable precision of silicon dimensional standards, Proceedings of the 4th euspen International Conference : May 31st - June 2nd 2004, Glasgow, Scotland, UK, 2004
  • Danzebrink, H.-U.; Dal Savio, C.; Krüger-Sehm, R.; Tyrrell, J. W. G.: Development of a combined interference and scanning probe microscope, Proceedings of the 4th euspen International Conference : May 31st - June 2nd 2004, Glasgow, Scotland, UK, 2004
  • Koenders, L.; Andreasen, J.; DeChiffre, L.; Jung, L.; Krüger-Sehm, R.: Euromet comparison on surface texture, XI. International Colloquium on Surfaces: Proceedings. Part 2, 2004
  • Krüger-Sehm, R.: Messunsicherheit und Kalibrierung von interferometrischen Oberflächenmessverfahren, Automatisierte optische Messtechnik und Bildverarbeitung: 24. Heidelberger Bildverarbeitungsforum, 2004
  • Koenders, L.; Dziomba, T.; Thomsen-Schmidt, P.; Senoner, M.: Normale für die dimensionelle und analytische Nanometrologie, PTB-Mitteilungen (2004)
2003
  • R. Krüger-Sehm, U. Brand, M. Greve: Depth setting standards and an Interference microscope for a measurement range up to 100 µm, Proceedings of IX. Int. Conf. on Metrology and Properties of Engineering Surfaces, 10.-11.09.2003, Halmstad, Sweden, p. 204 -214, ISBN Nr 91-631-5455-2
  • DKD-Richtlinie 4-2, 2003 Kalibrieren von Messgeräten und Normalen für die Rauheitsmesstechnik , Blatt 1: Kalibrieren von Normalen für die Rauheitsmesstechnik
  • Hahlweg, C.; Rinder, T.; Thomsen-Schmidt, P.; Groh, C.; Rothe, H.: Deducing light scatter from AFM-measurements, Surface scattering and diffraction III : 4 - 6 August 2003, San Diego, California, USA ; (Proceedings of SPIE: 5189), 2003
2002
  • Elster, C.; Gerhardt, J.; Thomsen-Schmidt, P.; Schulz, M.; Weingärtner, I.: Reconstructing surface profiles from curvature measurements, Optik (2002)
2001
  • Frühauf, J.; Krönert, S.; Brand, U.: Tiefen- und Längennormale aus Silizium, Technisches Messen 7/8 (2001), 326-332
  • Brand, U; Kleine-Besten, T; Cao, S; Hoffmann, W; Schwenke, H: Three-dimensional metrology for microsystem components, Proc. Micro System Technologies 2001, Düsseldorf 27th - 29 th March 2001, 193 - 198 (Vortrag)
  • Brand, U; Cao,S; Hoffmann, W; Kleine-Besten, T; Pornnoppadol, P; Büttgenbach, S: A Micro-Probing System for Dimensional Metrology on Microsystem Components, Proc. of 2nd euspen International Conference, Turin, Italy, May 27th - 31st, 2001, 266 - 269 (Poster)
  • Doering, L; Brand, U: Si-cantilevers with integrated piezo resistive elements as micro force transfer standards, Proc. Nanoscale 2001, Bergisch-Gladbach, 15./16.11.2001 (Poster)
  • Bütefisch, S., Büttgenbach, S., Kleine-Besten, T., Brand, U.: Micromechanical three-axial tactile force sensor for micromaterial characterisation, Microsystem Technologies 7, 2001, S. 171-174
2000 und davor
  • Jung, L.; Krüger-Sehm, R.; Spranger, B.; Koenders, L.: Reference Software for Roughness Analysis (Poster), Proc. of 2nd Int Conference EUSPEN 27.05.- 31.05.2001, Torino, p. 500 - 503
  • Gatzen, H.H.; Kourouklis, C.; Krüger-Sehm, R.: Roughness standards for the calibration of SPM- from design to comparison measurement, Proceedings of the Nanoscale 2001, 15.11.-16.11.2001, Bergisch Gladbach, PTB-Bericht PTB-F-44, 2001, ISBN 3- 89701-840-3, S. 7-12
  • Krüger-Sehm, R.; Luna Perez, J.A.: Proposal for a guideline to calibrate interference microscopes for use in roughness measurements, Int. J. of Machine Tools & Manufacture 41 (2001), S. 2123-2138
  • Krüger-Sehm, R.: Determination of nanometric step heights with interference microscopes, Proceedings of the 5th seminar on quantitative microscopy and 1st seminar on nanoscale calibration standards and methods: NanoScale 2001, Dimensional measurements in the micro- and nanometre range, PTB-Bericht PTB-F-44, (2001)
  • Jung, L.; Krüger-Sehm, R.; Spranger, B.; Koenders, L.: Reference Software for Roughness Analysis (Poster), Proc. of 2nd Int Conference EUSPEN 27.05.- 31.05.2001, Torino, p. 500 - 503
  • Gatzen, H.H.; Kourouklis, C.; Krüger-Sehm, R.: Roughness standards for the calibration of SPM- from design to comparison measurement, Proceedings of the Nanoscale 2001, 15.11.-16.11.2001, Bergisch Gladbach, PTB-Bericht PTB-F-44, 2001, ISBN 3- 89701-840-3, S. 7-12
  • Krüger-Sehm, R.; Luna Perez, J.A.: Proposal for a guideline to calibrate interference microscopes for use in roughness measurements, Int. J. of Machine Tools & Manufacture 41 (2001), S. 2123-2138
  • Krüger-Sehm, R.: Determination of nanometric step heights with interference microscopes, Proceedings of the 5th seminar on quantitative microscopy and 1st seminar on nanoscale calibration standards and methods: NanoScale 2001, Dimensional measurements in the micro- and nanometre range, PTB-Bericht PTB-F-44, (2001)
  • Jung, L.; Krüger-Sehm, R.; Spranger, B.; Koenders, L.: Reference Software for Roughness Analysis (Poster), Proc. of 2nd Int Conference EUSPEN 27.05.- 31.05.2001, Torino, p. 500 - 503
  • Gatzen, H.H.; Kourouklis, C.; Krüger-Sehm, R.: Roughness standards for the calibration of SPM- from design to comparison measurement, Proceedings of the Nanoscale 2001, 15.11.-16.11.2001, Bergisch Gladbach, PTB-Bericht PTB-F-44, 2001, ISBN 3- 89701-840-3, S. 7-12
  • Krüger-Sehm, R.; Luna Perez, J.A.: Proposal for a guideline to calibrate interference microscopes for use in roughness measurements, Int. J. of Machine Tools & Manufacture 41 (2001), S. 2123-2138
  • Krüger-Sehm, R.: Determination of nanometric step heights with interference microscopes, Proceedings of the 5th seminar on quantitative microscopy and 1st seminar on nanoscale calibration standards and methods: NanoScale 2001, Dimensional measurements in the micro- and nanometre range, PTB-Bericht PTB-F-44, (2001)
  • Jung, L.; Krüger-Sehm, R.; Spranger, B.; Koenders, L.: Reference Software for Roughness Analysis (Poster), Proc. of 2nd Int Conference EUSPEN 27.05.- 31.05.2001, Torino, p. 500 - 503
  • Gatzen, H.H.; Kourouklis, C.; Krüger-Sehm, R.: Roughness standards for the calibration of SPM- from design to comparison measurement, Proceedings of the Nanoscale 2001, 15.11.-16.11.2001, Bergisch Gladbach, PTB-Bericht PTB-F-44, 2001, ISBN 3- 89701-840-3, S. 7-12
  • Krüger-Sehm, R.; Luna Perez, J.A.: Proposal for a guideline to calibrate interference microscopes for use in roughness measurements, Int. J. of Machine Tools & Manufacture 41 (2001), S. 2123-2138
  • Krüger-Sehm, R.: Determination of nanometric step heights with interference microscopes, Proceedings of the 5th seminar on quantitative microscopy and 1st seminar on nanoscale calibration standards and methods: NanoScale 2001, Dimensional measurements in the micro- and nanometre range, PTB-Bericht PTB-F-44, (2001)
  • Jung, L.; Krüger-Sehm, R.; Spranger, B.; Koenders, L.: Reference Software for Roughness Analysis (Poster), Proc. of 2nd Int Conference EUSPEN 27.05.- 31.05.2001, Torino, p. 500 - 503
  • Gatzen, H.H.; Kourouklis, C.; Krüger-Sehm, R.: Roughness standards for the calibration of SPM- from design to comparison measurement, Proceedings of the Nanoscale 2001, 15.11.-16.11.2001, Bergisch Gladbach, PTB-Bericht PTB-F-44, 2001, ISBN 3- 89701-840-3, S. 7-12
  • Krüger-Sehm, R.; Luna Perez, J.A.: Proposal for a guideline to calibrate interference microscopes for use in roughness measurements, Int. J. of Machine Tools & Manufacture 41 (2001), S. 2123-2138
  • Krüger-Sehm, R.: Determination of nanometric step heights with interference microscopes, Proceedings of the 5th seminar on quantitative microscopy and 1st seminar on nanoscale calibration standards and methods: NanoScale 2001, Dimensional measurements in the micro- and nanometre range, PTB-Bericht PTB-F-44, (2001)
  • Jung, L.; Krüger-Sehm, R.; Spranger, B.; Koenders, L.: Reference Software for Roughness Analysis (Poster), Proc. of 2nd Int Conference EUSPEN 27.05.- 31.05.2001, Torino, p. 500 - 503
  • Gatzen, H.H.; Kourouklis, C.; Krüger-Sehm, R.: Roughness standards for the calibration of SPM- from design to comparison measurement, Proceedings of the Nanoscale 2001, 15.11.-16.11.2001, Bergisch Gladbach, PTB-Bericht PTB-F-44, 2001, ISBN 3- 89701-840-3, S. 7-12
  • Krüger-Sehm, R.; Luna Perez, J.A.: Proposal for a guideline to calibrate interference microscopes for use in roughness measurements, Int. J. of Machine Tools & Manufacture 41 (2001), S. 2123-2138
  • Krüger-Sehm, R.: Determination of nanometric step heights with interference microscopes, Proceedings of the 5th seminar on quantitative microscopy and 1st seminar on nanoscale calibration standards and methods: NanoScale 2001, Dimensional measurements in the micro- and nanometre range, PTB-Bericht PTB-F-44, (2001)
  • Jung, L.; Krüger-Sehm, R.; Spranger, B.; Koenders, L.: Reference Software for Roughness Analysis (Poster), Proc. of 2nd Int Conference EUSPEN 27.05.- 31.05.2001, Torino, p. 500 - 503
  • Gatzen, H.H.; Kourouklis, C.; Krüger-Sehm, R.: Roughness standards for the calibration of SPM- from design to comparison measurement, Proceedings of the Nanoscale 2001, 15.11.-16.11.2001, Bergisch Gladbach, PTB-Bericht PTB-F-44, 2001, ISBN 3- 89701-840-3, S. 7-12
  • Krüger-Sehm, R.; Luna Perez, J.A.: Proposal for a guideline to calibrate interference microscopes for use in roughness measurements, Int. J. of Machine Tools & Manufacture 41 (2001), S. 2123-2138
  • Krüger-Sehm, R.: Determination of nanometric step heights with interference microscopes, Proceedings of the 5th seminar on quantitative microscopy and 1st seminar on nanoscale calibration standards and methods: NanoScale 2001, Dimensional measurements in the micro- and nanometre range, PTB-Bericht PTB-F-44, (2001)
  • Jung, L.; Krüger-Sehm, R.; Spranger, B.; Koenders, L.: Reference Software for Roughness Analysis (Poster), Proc. of 2nd Int Conference EUSPEN 27.05.- 31.05.2001, Torino, p. 500 - 503
  • Gatzen, H.H.; Kourouklis, C.; Krüger-Sehm, R.: Roughness standards for the calibration of SPM- from design to comparison measurement, Proceedings of the Nanoscale 2001, 15.11.-16.11.2001, Bergisch Gladbach, PTB-Bericht PTB-F-44, 2001, ISBN 3- 89701-840-3, S. 7-12
  • Krüger-Sehm, R.; Luna Perez, J.A.: Proposal for a guideline to calibrate interference microscopes for use in roughness measurements, Int. J. of Machine Tools & Manufacture 41 (2001), S. 2123-2138
  • Krüger-Sehm, R.: Determination of nanometric step heights with interference microscopes, Proceedings of the 5th seminar on quantitative microscopy and 1st seminar on nanoscale calibration standards and methods: NanoScale 2001, Dimensional measurements in the micro- and nanometre range, PTB-Bericht PTB-F-44, (2001)
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