Krüger-Sehm,
R.; Seewig, J.: Messunsicherheit bei der
Bestimmung von
Rauheitskennwerten mit Tastschnittgeräten,
Messunsicherheit praxisgerecht bestimmen: Grundlagen,
Praxisbeispiele, VDI-Berichte: 1947, 2006
Shaleev,
M. V.; Dziomba, T.; Krüger-Sehm, R.: Ge(Si) self-assembled
islands as possible topography standards on the nanometre scale, ohne
schriftliche Quelle: no written source, 2006
Bakucz,
P.; Krüger-Sehm, R: Wavelet filtering with ISO /TS
16610-29, MicroCAD 2006 : international scientific
conference, 16 - 17 March 2006, 2006
Bakucz, P.;
Krüger-Sehm, R: Morphological filter based
investigation of influence of tip size on roughness measurements,
MicroCAD 2006 : international scientific conference, 16 - 17 March
2006, 2006
2005
Krüger-Sehm,
R.: Comparison of methods for the determination of
the aperture correction of interference microscopes, Nano-
and Micrometrology : 16 - 17 June 2005, Munich, Germany ; (Proceedings
of SPIE: 5858) (2005)
Krüger-Sehm, R.; Dziomba, T.;
Dai, G.: Investigations of nanoroughness standards by
scanning force microscopes and interference microscope,
Nanoscale calibration standards and methods: dimensional and related
measurements in the micro- and nanometer range (2005)
Krüger-Sehm,
R.; Frühauf, J.; Dziomba, T.: Determination of the short
wavelength cutoff of interferential and confocal microscopes,
Proceedings of the 10th International Conference on Metrology and
properties of engineering surfaces ; July 4 - 7, 2005, Saint-Etienne,
France (2005)
2004
M. Greve, R.
Krüger-Sehm: Direct
determination of the numerical aperture correction factor of
interference microscopes, Proceedings of the XI.
Int. Coll. on Surfaces, Chemnitz, 2.-3.02.2004, p. 156-163, ISBN
3-8322-2418-1
R. Krüger-Sehm, T. Dziomba, G. Dai:
Profile assessment of
nano-roughness standards by contact and
non-contact methods, Proceedings of the XI. Int. Coll. on
Surfaces,
Chemnitz, 2.-3.02.2004, p. 31-40, ISBN 3-8322-2418-1
R.
Krüger-Sehm, W. Häßler-Grohne, J. Frühauf: Traceable
calibration standard for the lateral axis of contact stylus
instruments, IX. Int. Conf. on Metrology and Properties of
Engineering
Surfaces, 10.-11.09.2003, Halmstad, Sweden, Wear,Vol 257 (2004), 12, pp
1241-1245
Thomsen-Schmidt,
P., Krüger-Sehm, R., Wolff, H.: Development of a new stylus
contacting system for roughness measurement, Proc. XI. Int
Coll. on Surfaces part 2, Chemnitz, 02. -03.02.2004, S. 79 -86, ISBN
3-8322-2419-0
L. Jung, B. Spranger, R. Krüger-Sehm,
M. Krystek: Reference software for roughness
analysis-features and results, Proc. XI. Int Coll. on
Surfaces
part 2, Chemnitz, 02. -03.02.2004, S. 164-170, ISBN 3-8322-2419-0
Tyrrell,
J.W.G.; Dal Savio, C.; Krüger-Sehm, R.; Danzebrink, H.-U.:
Development of a combined interference microscope objective and
scanning probe microscope, Rev. Sci. Instrum. 75 (2004), 4,
1120-1126
Krüger-Sehm, R.; Brand, U.; Greve, M.: Depth
setting standards and an interference microscope for a measuring range
up to 100 μm, Proceedings of the 9th International Conference
on Metrology and Properties of Engineering Surfaces, 2004
Danzebrink,
H.-U.; Tyrell, J. W. G.; Dal Savio, C.; Krüger-Sehm, R.: Combined
interference and scanning force microscope, Optical metrology
in production engineering, Proceedings of SPIE: 5457, 2004
Dai,
G.; Jung, L.; Pohlenz, F.; Danzebrink, H.-U.; Krüger-Sehm, R.; Hasche,
K.; Wilkening, G.: Measurement of micro-roughness using a
metrological large range scanning force microscope,
Measurement Science and Technology, 2004
Krüger-Sehm,
R.: Richtlinie zur Kalibrierung von Interferenzmikroskopen,
Optische 3D-Meßtechnik für die Qualitätssicherung in der Produktion :
Seminar 365904 am 01. - 02. Juli 2004 im Fraunhofer-Allianz Vision beim
Fraunhofer IPT, Aachen, 2004
Brand, U.;
Krüger-Sehm, R.; Frühauf, J.; Krönert, S.: Reachable
precision of silicon dimensional standards, Proceedings of
the 4th euspen International Conference : May 31st - June 2nd 2004,
Glasgow, Scotland, UK, 2004
Danzebrink,
H.-U.; Dal Savio, C.; Krüger-Sehm, R.; Tyrrell, J. W. G.: Development
of a combined interference and scanning probe microscope,
Proceedings of the 4th euspen International Conference : May 31st -
June 2nd 2004, Glasgow, Scotland, UK, 2004
Koenders,
L.; Andreasen, J.; DeChiffre, L.; Jung, L.; Krüger-Sehm, R.: Euromet
comparison on surface texture, XI. International Colloquium
on Surfaces: Proceedings. Part 2, 2004
Krüger-Sehm,
R.: Messunsicherheit und Kalibrierung von interferometrischen
Oberflächenmessverfahren, Automatisierte optische Messtechnik
und Bildverarbeitung: 24. Heidelberger Bildverarbeitungsforum, 2004
Koenders,
L.; Dziomba, T.; Thomsen-Schmidt, P.; Senoner, M.: Normale
für die dimensionelle und analytische Nanometrologie,
PTB-Mitteilungen (2004)
2003
R.
Krüger-Sehm, U. Brand, M. Greve: Depth setting standards and
an Interference microscope for a measurement range up to 100 µm,
Proceedings of IX. Int. Conf. on Metrology and Properties of
Engineering Surfaces, 10.-11.09.2003, Halmstad, Sweden, p. 204 -214,
ISBN Nr 91-631-5455-2
DKD-Richtlinie
4-2, 2003 Kalibrieren von Messgeräten und Normalen für die
Rauheitsmesstechnik , Blatt 1: Kalibrieren von Normalen für
die Rauheitsmesstechnik
Hahlweg, C.; Rinder, T.;
Thomsen-Schmidt, P.; Groh, C.; Rothe, H.: Deducing light
scatter from AFM-measurements, Surface scattering and
diffraction III : 4 - 6 August 2003, San Diego, California, USA ;
(Proceedings of SPIE: 5189), 2003
2002
Elster,
C.; Gerhardt, J.; Thomsen-Schmidt, P.; Schulz, M.; Weingärtner, I.:
Reconstructing surface profiles from curvature measurements,
Optik (2002)
2001
Frühauf,
J.; Krönert, S.; Brand, U.: Tiefen-
und Längennormale aus Silizium, Technisches
Messen 7/8 (2001), 326-332
Brand,
U; Kleine-Besten,
T; Cao, S; Hoffmann, W; Schwenke, H:
Three-dimensional
metrology for microsystem components, Proc. Micro
System Technologies 2001, Düsseldorf 27th - 29 th March 2001, 193 - 198
(Vortrag)
Brand, U; Cao,S;
Hoffmann, W;
Kleine-Besten, T; Pornnoppadol,
P; Büttgenbach, S: A
Micro-Probing System for Dimensional Metrology on
Microsystem Components, Proc. of 2nd euspen International
Conference,
Turin, Italy, May 27th - 31st, 2001, 266 - 269 (Poster)
Doering,
L; Brand, U: Si-cantilevers
with integrated piezo
resistive elements as micro force transfer standards,
Proc. Nanoscale
2001, Bergisch-Gladbach, 15./16.11.2001 (Poster)
Bütefisch,
S., Büttgenbach, S., Kleine-Besten, T., Brand, U.:
Micromechanical
three-axial tactile force sensor for micromaterial
characterisation, Microsystem Technologies 7, 2001, S.
171-174
2000
und davor
Jung,
L.; Krüger-Sehm, R.; Spranger, B.; Koenders, L.: Reference
Software for Roughness Analysis (Poster), Proc. of 2nd
Int Conference EUSPEN 27.05.- 31.05.2001, Torino, p. 500 - 503
Gatzen,
H.H.; Kourouklis, C.; Krüger-Sehm, R.: Roughness standards
for the calibration of SPM- from design to comparison measurement,
Proceedings of the Nanoscale 2001, 15.11.-16.11.2001, Bergisch
Gladbach, PTB-Bericht PTB-F-44, 2001, ISBN 3- 89701-840-3, S. 7-12
Krüger-Sehm,
R.; Luna Perez, J.A.: Proposal for a guideline to calibrate
interference microscopes for use in roughness measurements,
Int. J. of Machine Tools & Manufacture 41 (2001), S. 2123-2138
Krüger-Sehm,
R.: Determination of nanometric step heights with interference
microscopes, Proceedings of the 5th seminar on quantitative
microscopy and 1st seminar on nanoscale calibration standards and
methods: NanoScale 2001, Dimensional measurements in the micro- and
nanometre range, PTB-Bericht PTB-F-44, (2001)
Jung,
L.; Krüger-Sehm, R.; Spranger, B.; Koenders, L.: Reference
Software for Roughness Analysis (Poster), Proc. of 2nd
Int Conference EUSPEN 27.05.- 31.05.2001, Torino, p. 500 - 503
Gatzen,
H.H.; Kourouklis, C.; Krüger-Sehm, R.: Roughness standards
for the calibration of SPM- from design to comparison measurement,
Proceedings of the Nanoscale 2001, 15.11.-16.11.2001, Bergisch
Gladbach, PTB-Bericht PTB-F-44, 2001, ISBN 3- 89701-840-3, S. 7-12
Krüger-Sehm,
R.; Luna Perez, J.A.: Proposal for a guideline to calibrate
interference microscopes for use in roughness measurements,
Int. J. of Machine Tools & Manufacture 41 (2001), S. 2123-2138
Krüger-Sehm,
R.: Determination of nanometric step heights with interference
microscopes, Proceedings of the 5th seminar on quantitative
microscopy and 1st seminar on nanoscale calibration standards and
methods: NanoScale 2001, Dimensional measurements in the micro- and
nanometre range, PTB-Bericht PTB-F-44, (2001)
Jung,
L.; Krüger-Sehm, R.; Spranger, B.; Koenders, L.: Reference
Software for Roughness Analysis (Poster), Proc. of 2nd
Int Conference EUSPEN 27.05.- 31.05.2001, Torino, p. 500 - 503
Gatzen,
H.H.; Kourouklis, C.; Krüger-Sehm, R.: Roughness standards
for the calibration of SPM- from design to comparison measurement,
Proceedings of the Nanoscale 2001, 15.11.-16.11.2001, Bergisch
Gladbach, PTB-Bericht PTB-F-44, 2001, ISBN 3- 89701-840-3, S. 7-12
Krüger-Sehm,
R.; Luna Perez, J.A.: Proposal for a guideline to calibrate
interference microscopes for use in roughness measurements,
Int. J. of Machine Tools & Manufacture 41 (2001), S. 2123-2138
Krüger-Sehm,
R.: Determination of nanometric step heights with interference
microscopes, Proceedings of the 5th seminar on quantitative
microscopy and 1st seminar on nanoscale calibration standards and
methods: NanoScale 2001, Dimensional measurements in the micro- and
nanometre range, PTB-Bericht PTB-F-44, (2001)
Jung,
L.; Krüger-Sehm, R.; Spranger, B.; Koenders, L.: Reference
Software for Roughness Analysis (Poster), Proc. of 2nd
Int Conference EUSPEN 27.05.- 31.05.2001, Torino, p. 500 - 503
Gatzen,
H.H.; Kourouklis, C.; Krüger-Sehm, R.: Roughness standards
for the calibration of SPM- from design to comparison measurement,
Proceedings of the Nanoscale 2001, 15.11.-16.11.2001, Bergisch
Gladbach, PTB-Bericht PTB-F-44, 2001, ISBN 3- 89701-840-3, S. 7-12
Krüger-Sehm,
R.; Luna Perez, J.A.: Proposal for a guideline to calibrate
interference microscopes for use in roughness measurements,
Int. J. of Machine Tools & Manufacture 41 (2001), S. 2123-2138
Krüger-Sehm,
R.: Determination of nanometric step heights with interference
microscopes, Proceedings of the 5th seminar on quantitative
microscopy and 1st seminar on nanoscale calibration standards and
methods: NanoScale 2001, Dimensional measurements in the micro- and
nanometre range, PTB-Bericht PTB-F-44, (2001)
Jung,
L.; Krüger-Sehm, R.; Spranger, B.; Koenders, L.: Reference
Software for Roughness Analysis (Poster), Proc. of 2nd
Int Conference EUSPEN 27.05.- 31.05.2001, Torino, p. 500 - 503
Gatzen,
H.H.; Kourouklis, C.; Krüger-Sehm, R.: Roughness standards
for the calibration of SPM- from design to comparison measurement,
Proceedings of the Nanoscale 2001, 15.11.-16.11.2001, Bergisch
Gladbach, PTB-Bericht PTB-F-44, 2001, ISBN 3- 89701-840-3, S. 7-12
Krüger-Sehm,
R.; Luna Perez, J.A.: Proposal for a guideline to calibrate
interference microscopes for use in roughness measurements,
Int. J. of Machine Tools & Manufacture 41 (2001), S. 2123-2138
Krüger-Sehm,
R.: Determination of nanometric step heights with interference
microscopes, Proceedings of the 5th seminar on quantitative
microscopy and 1st seminar on nanoscale calibration standards and
methods: NanoScale 2001, Dimensional measurements in the micro- and
nanometre range, PTB-Bericht PTB-F-44, (2001)
Jung,
L.; Krüger-Sehm, R.; Spranger, B.; Koenders, L.: Reference
Software for Roughness Analysis (Poster), Proc. of 2nd
Int Conference EUSPEN 27.05.- 31.05.2001, Torino, p. 500 - 503
Gatzen,
H.H.; Kourouklis, C.; Krüger-Sehm, R.: Roughness standards
for the calibration of SPM- from design to comparison measurement,
Proceedings of the Nanoscale 2001, 15.11.-16.11.2001, Bergisch
Gladbach, PTB-Bericht PTB-F-44, 2001, ISBN 3- 89701-840-3, S. 7-12
Krüger-Sehm,
R.; Luna Perez, J.A.: Proposal for a guideline to calibrate
interference microscopes for use in roughness measurements,
Int. J. of Machine Tools & Manufacture 41 (2001), S. 2123-2138
Krüger-Sehm,
R.: Determination of nanometric step heights with interference
microscopes, Proceedings of the 5th seminar on quantitative
microscopy and 1st seminar on nanoscale calibration standards and
methods: NanoScale 2001, Dimensional measurements in the micro- and
nanometre range, PTB-Bericht PTB-F-44, (2001)
Jung,
L.; Krüger-Sehm, R.; Spranger, B.; Koenders, L.: Reference
Software for Roughness Analysis (Poster), Proc. of 2nd
Int Conference EUSPEN 27.05.- 31.05.2001, Torino, p. 500 - 503
Gatzen,
H.H.; Kourouklis, C.; Krüger-Sehm, R.: Roughness standards
for the calibration of SPM- from design to comparison measurement,
Proceedings of the Nanoscale 2001, 15.11.-16.11.2001, Bergisch
Gladbach, PTB-Bericht PTB-F-44, 2001, ISBN 3- 89701-840-3, S. 7-12
Krüger-Sehm,
R.; Luna Perez, J.A.: Proposal for a guideline to calibrate
interference microscopes for use in roughness measurements,
Int. J. of Machine Tools & Manufacture 41 (2001), S. 2123-2138
Krüger-Sehm,
R.: Determination of nanometric step heights with interference
microscopes, Proceedings of the 5th seminar on quantitative
microscopy and 1st seminar on nanoscale calibration standards and
methods: NanoScale 2001, Dimensional measurements in the micro- and
nanometre range, PTB-Bericht PTB-F-44, (2001)
Jung,
L.; Krüger-Sehm, R.; Spranger, B.; Koenders, L.: Reference
Software for Roughness Analysis (Poster), Proc. of 2nd
Int Conference EUSPEN 27.05.- 31.05.2001, Torino, p. 500 - 503
Gatzen,
H.H.; Kourouklis, C.; Krüger-Sehm, R.: Roughness standards
for the calibration of SPM- from design to comparison measurement,
Proceedings of the Nanoscale 2001, 15.11.-16.11.2001, Bergisch
Gladbach, PTB-Bericht PTB-F-44, 2001, ISBN 3- 89701-840-3, S. 7-12
Krüger-Sehm,
R.; Luna Perez, J.A.: Proposal for a guideline to calibrate
interference microscopes for use in roughness measurements,
Int. J. of Machine Tools & Manufacture 41 (2001), S. 2123-2138
Krüger-Sehm,
R.: Determination of nanometric step heights with interference
microscopes, Proceedings of the 5th seminar on quantitative
microscopy and 1st seminar on nanoscale calibration standards and
methods: NanoScale 2001, Dimensional measurements in the micro- and
nanometre range, PTB-Bericht PTB-F-44, (2001)