Roughness Measuring Methods

Publications 

• Krüger-Sehm, R.; Seewig, J.: Messunsicherheit bei der Bestimmung von Rauheitskennwerten mit Tastschnittgeräten, Messunsicherheit praxisgerecht bestimmen: Grundlagen, Praxisbeispiele, VDI-Berichte: 1947, 2006
• Shaleev, M. V.; Dziomba, T.; Krüger-Sehm, R.: Ge(Si) self-assembled islands as possible topography standards on the nanometre scale, ohne schriftliche Quelle: no written source, 2006
• Bakucz, P.; Krüger-Sehm, R: Wavelet filtering with ISO /TS 16610-29, MicroCAD 2006 : international scientific conference, 16 - 17 March 2006, 2006
• Bakucz, P.; Krüger-Sehm, R: Morphological filter based investigation of influence of tip size on roughness measurements, MicroCAD 2006 : international scientific conference, 16 - 17 March 2006, 2006

• Krüger-Sehm, R.: Comparison of methods for the determination of the aperture correction of interference microscopes, Nano- and Micrometrology : 16 - 17 June 2005, Munich, Germany ; (Proceedings of SPIE: 5858) (2005)
• Krüger-Sehm, R.; Dziomba, T.; Dai, G.: Investigations of nanoroughness standards by scanning force microscopes and interference microscope, Nanoscale calibration standards and methods: dimensional and related measurements in the micro- and nanometer range (2005)
• Krüger-Sehm, R.; Frühauf, J.; Dziomba, T.: Determination of the short wavelength cutoff of interferential and confocal microscopes, Proceedings of the 10th International Conference on Metrology and properties of engineering surfaces ; July 4 - 7, 2005, Saint-Etienne, France (2005)

• M. Greve, R. Krüger-Sehm: Direct determination of the numerical aperture correction factor of interference microscopes, Proceedings of the XI. Int. Coll. on Surfaces, Chemnitz, 2.-3.02.2004, p. 156-163, ISBN 3-8322-2418-1
• R. Krüger-Sehm, T. Dziomba, G. Dai: Profile assessment of nano-roughness standards by contact and non-contact methods, Proceedings of the XI. Int. Coll. on Surfaces, Chemnitz, 2.-3.02.2004, p. 31-40, ISBN 3-8322-2418-1
• R. Krüger-Sehm, W. Häßler-Grohne, J. Frühauf: Traceable calibration standard for the lateral axis of contact stylus instruments, IX. Int. Conf. on Metrology and Properties of Engineering Surfaces, 10.-11.09.2003, Halmstad, Sweden, Wear,Vol 257 (2004), 12, pp 1241-1245
• Thomsen-Schmidt, P., Krüger-Sehm, R., Wolff, H.: Development of a new stylus contacting system for roughness measurement, Proc. XI. Int Coll. on Surfaces part 2, Chemnitz, 02. -03.02.2004, S. 79 -86, ISBN 3-8322-2419-0
• L. Jung, B. Spranger, R. Krüger-Sehm, M. Krystek: Reference software for roughness analysis-features and results, Proc. XI. Int Coll. on Surfaces part 2, Chemnitz, 02. -03.02.2004, S. 164-170, ISBN 3-8322-2419-0
• Tyrrell, J.W.G.; Dal Savio, C.; Krüger-Sehm, R.; Danzebrink, H.-U.: Development of a combined interference microscope objective and scanning probe microscope, Rev. Sci. Instrum. 75 (2004), 4, 1120-1126
• Krüger-Sehm, R.; Brand, U.; Greve, M.: Depth setting standards and an interference microscope for a measuring range up to 100 μm, Proceedings of the 9th International Conference on Metrology and Properties of Engineering Surfaces, 2004
• Danzebrink, H.-U.; Tyrell, J. W. G.; Dal Savio, C.; Krüger-Sehm, R.: Combined interference and scanning force microscope, Optical metrology in production engineering, Proceedings of SPIE: 5457, 2004
• Dai, G.; Jung, L.; Pohlenz, F.; Danzebrink, H.-U.; Krüger-Sehm, R.; Hasche, K.; Wilkening, G.: Measurement of micro-roughness using a metrological large range scanning force microscope, Measurement Science and Technology, 2004
• Krüger-Sehm, R.: Richtlinie zur Kalibrierung von Interferenzmikroskopen, Optische 3D-Meßtechnik für die Qualitätssicherung in der Produktion : Seminar 365904 am 01. - 02. Juli 2004 im Fraunhofer-Allianz Vision beim Fraunhofer IPT, Aachen, 2004
• Brand, U.; Krüger-Sehm, R.; Frühauf, J.; Krönert, S.: Reachable precision of silicon dimensional standards, Proceedings of the 4th euspen International Conference : May 31st - June 2nd 2004, Glasgow, Scotland, UK, 2004
• Danzebrink, H.-U.; Dal Savio, C.; Krüger-Sehm, R.; Tyrrell, J. W. G.: Development of a combined interference and scanning probe microscope, Proceedings of the 4th euspen International Conference : May 31st - June 2nd 2004, Glasgow, Scotland, UK, 2004
• Koenders, L.; Andreasen, J.; DeChiffre, L.; Jung, L.; Krüger-Sehm, R.: Euromet comparison on surface texture, XI. International Colloquium on Surfaces: Proceedings. Part 2, 2004
• Krüger-Sehm, R.: Messunsicherheit und Kalibrierung von interferometrischen Oberflächenmessverfahren, Automatisierte optische Messtechnik und Bildverarbeitung: 24. Heidelberger Bildverarbeitungsforum, 2004
• Koenders, L.; Dziomba, T.; Thomsen-Schmidt, P.; Senoner, M.: Normale für die dimensionelle und analytische Nanometrologie, PTB-Mitteilungen (2004)

• R. Krüger-Sehm, U. Brand, M. Greve: Depth setting standards and an Interference microscope for a measurement range up to 100 µm, Proceedings of IX. Int. Conf. on Metrology and Properties of Engineering Surfaces, 10.-11.09.2003, Halmstad, Sweden, p. 204 -214, ISBN Nr 91-631-5455-2
• DKD-Richtlinie 4-2, 2003: Kalibrieren von Messgeräten und Normalen für die Rauheitsmesstechnik , Blatt 1: Kalibrieren von Normalen für die Rauheitsmesstechnik
• Hahlweg, C.; Rinder, T.; Thomsen-Schmidt, P.; Groh, C.; Rothe, H.: Deducing light scatter from AFM-measurements, Surface scattering and diffraction III : 4 - 6 August 2003, San Diego, California, USA ; (Proceedings of SPIE: 5189), 2003

• Elster, C.; Gerhardt, J.; Thomsen-Schmidt, P.; Schulz, M.; Weingärtner, I.: Reconstructing surface profiles from curvature measurements, Optik (2002)

• Jung, L.; Krüger-Sehm, R.; Spranger, B.; Koenders, L.: Reference Software for Roughness Analysis (Poster), Proc. of 2^nd Int Conference EUSPEN 27.05.- 31.05.2001, Torino, p. 500 - 503
• Gatzen, H.H.; Kourouklis, C.; Krüger-Sehm, R.: Roughness standards for the calibration of SPM- from design to comparison measurement, Proceedings of the Nanoscale 2001, 15.11.-16.11.2001, Bergisch Gladbach, PTB-Bericht PTB-F-44, 2001, ISBN 3- 89701-840-3, S. 7-12
• Krüger-Sehm, R.; Luna Perez, J.A.: Proposal for a guideline to calibrate interference microscopes for use in roughness measurements, Int. J. of Machine Tools & Manufacture 41 (2001), S. 2123-2138
• Krüger-Sehm, R.: Determination of nanometric step heights with interference microscopes, Proceedings of the 5th seminar on quantitative microscopy and 1st seminar on nanoscale calibration standards and methods: NanoScale 2001, Dimensional measurements in the micro- and nanometre range, PTB-Bericht PTB-F-44, (2001)

• Brand, U.; Krüger-Sehm, R.; Stuht, P.; Koenders, L.; Hinzmann, G.; Feist, C.; Jäger, V.: Depth setting standards for profilometers and interference microscopes (poster), X. Int. Coll of surfaces, 31.01.2000, Chemnitz, p. 367, ISBN 3-8265-6999-7, 2000
• Brand, U., Hinzmann, G.; Schnädelbach, H.; Feist, C.; Stuht, P.; Krüger-Sehm, R.; Jäger, V.: Rückführbare Präzisions-Tiefeneinstellnormale für Messbereiche von 1 µm bis 1 mm, Technisches Messen 12/99 , S. 496- S. 503, 1999
• Krüger-Sehm, R.; Krystek, M.: Uncertainty analysis of roughness measurement, X. International Colloquium on Surfaces = X. Internationales Oberflächenkolloquium, 2000
• Jung, L.; Krüger-Sehm, R.; Koenders, L.; Voigt, M.: Reference software for roughness analysis [Poster], X. International Colloquium on Surfaces = X. Internationales Oberflächenkolloquium, 2000
• Thomsen-Schmidt, P.; Schulz, M.; Weingärtner, I.: Form measurement by optical scanning techniques. Formmessung mit optischen Scantechniken, X. International Colloquium on Surfaces = X. Internationales Oberflächenkolloquium, 2000
• Thomsen-Schmidt, P.: Ultrapräzise Topographiemessung and Freiformflächen, Deutsche Gesellschaft für angewandte Optik. Einladung und Programm zur 101. Tagung, 2000
• Weingärtner, I.; Schulz, M.; Thomsen-Schmidt, P. : New Concepts for Determining Slope and Figure from Measurements of Slope Difference and Curvature, International Workshop on Metrology for X-ray and Neutron Optics, 2000
• Schulz, M. [speaker]; Thomsen-Schmidt, P.; Weingärtner, I.: Development of a facility for measuring steep aspheres with nanometer accuracy, Proceedings of the 1st Euspen Topical Conference on Fabrication and Metrology in Nanotechnology, 2000