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Structure
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Division 5
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Department 5.1
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Working Group 5.14
Working Group 5.14
Roughness Measuring Methods
–
Development of profile methods
–
Interference microscopy
–
Developments in the field of interference
microscopy
–
Development of measurement standards
–
Scattered light measuring procedures
–
Standards in the Roughness Measuring
Techniques
|
–
Contact persons
–
Publications
–
Measurement and calibration capabilities
|
Development of calibration standards
Geometrical standards
function
Calibration of the vertical and horizontal measurement system of contact stylus instruments
specifications
Manufactured by single diamond turning
Pure sinusoidal profile (type C nach ISO 5436-1)
DLC-(„Diamond like Carbon“) covering for increased resistance to wear and reduction of friction
Layout of proven „Halle“-roughness calibration standards
Useable width of profile about 5 mm
3 different types with the following nominal values:
type
use for cutoff in mm
amplitude
Pt
in µm
period in µm
peakcount PC per cm
profile length acc. ISO 4288 in mm
realised length of profile in mm
fine
0.25
0.4
50
200
1.25
4
medium
0.8
3
140
71
4.0
8
coarse
2.5
15
450
22
12.5
20
Chirp-standard
function
Testing of the transfer behaviour of surface measuring instruments by a set of different spatial wavelengths
specifications
Wavelengths from 10 µm to 91 µm
Wavelength change steps of about 10%
24 wavelentgh values (according to „E-24-series“)
constant amplitude (
Pt
) of 1 µm
At wavelength 10 µm:
smallest curvature about 5 µm
maximum slope about 0.3 rad
At wavelength 91 µm:
biggest curvature about 300 µm
smallest slope ca. 0.04 rad
Figure 1: section of Chirp-standard
<
© Physikalisch-Technische Bundesanstalt (PTB)
Page created: 2004-04-26, last update: 2008-04-02,
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Silke Hube
|