Surface Metrology on Nanostructures

Publications WG 5.14

• Yacoot, A.; Koenders, L.; Wolff, H.: An atomic force microscope fort he study of Tipp-sample interactions, Measurement Science and technology, 2007, to be published
• Dziomba, T.; Koenders, L.; Weimann, T.; Hinze, P.; Sievers, S.; Shaleev, M.; Ritter, M.; Kranzmann, A.; Senoner, M.; Unger, W.: Novel standards for AFM, other SPM methods and nano-analytical techniques, In: Nanofizika i nanoelektronika : XI mezdunarodnyj simpozium. T. 1., 2007, S. 103 - 106
• Ritter, M.; Dziomba, T.; Kranzmann, A.; Koenders, L.: A landmark based 3D calibration strategy for SPM, In: Measurement Science and Technology. Bristol : IOP, 2007, S. 404 - 414

• Dai, G.; Pohlenz, F.; Xu, M.; Koenders, L.; Danzebrink, H.-U.; Wilkening, G.: Accurate and traceable measurement of nano- and microstructures, In: Measurement Science and Technology 17 (2006), Nr. 3, S. 545 - 552
• Dai, G.; Koenders, L.; Danzebrink, H.-U.; Wilkening, G.; Zhou, J.-X.; Chen, Z.-Y.: Metrological scanning probe microscopy applied for calibrations of micro- and nanoscale transfer standards [chin. Schr.], In: Nanotechnology and Precision Engineering 4 (2006), Nr. 1, S. 10 - 19
• Koenders, L.; Brand, U.: Rückführung in der dimensionellen Mikro- und Nanomesstechnik, In: Messunsicherheit praxisgerecht bestimmen : Grundlagen, Praxisbeispiele, 2006 (VDI-Berichte: 1947), S. 237 - 248, ISBN 3-18-091947
• Ritter, M.; Dziomba, T.; Xu, M.; Koenders, L.; Kranzmann, A.: Eine neue 3D Kalibrierstrategie für Mikro- und Nanomessverfahren, In: Messtechnik für Mikro- und Nano-Engineering : Tagung Erlangen, 29. und 30. November 2006, 2006 (VDI-Berichte: 1950), S. 15 - 24, ISBN 3-18-091950-7
• Danzebrink, H.-U.; Koenders, L.; Wilkening, G.; Yacoot, A.; Kunzmann, H.: Advances in Scanning Force Microscopy for Dimensional Metrology, Annals of the CIRP 55/2 (2006) S. 841 - 879
• Koenders, L.; Klapetek, P.; Meli, F.; Picotto, G.-B.: Comparison on step height measurements in the nano and micrometre range by scanning force microscopes, In: Metrologia 43 (2006), [Online only]
• Bodermann, B.; Bosse, H.; Frase, C. G.; Koenders, L.; Wilkening, G.: Sensoren der Mikro- und Nanomesstechnik, In: Messtechnik für Mikro- und Nano-Engineering : Tagung Erlangen, 29. und 30. November 2006, 2006 (VDI-Berichte: 1950), S. 99 - 108,ISBN 3-18-091950-7
• Danzebrink, H.-U.; Koenders, L.; Wilkening, G.: The scanning force microscope as a measuring tool, In: Simposio de Metrología 2006, 25, 26 y 27 de octubre, CENAM, 2006, [CD-ROM]
• Dai, G.; Pohlenz, F.; Dziomba, T.; Xu, M.; Diener, A.; Koenders, L.; Danzebrink, H.-U.: Accurate and traceable calibration of two-dimensional gratings, In: Measurement Science and Technology, 2006, S. 415 - 421

• Dziomba, T.; Koenders, L.; Wilkening, G.; Flemming, M.; Duparre, A.: Entwicklung einer Kalibrierrichtlinie für Rastersondenmikroskope, In: Technisches Messen 72 (2005), Nr. 5, S. 295 - 307
• Dziomba, T.; Koenders, L.; Wilkening, G.: Towards a guideline for SPM calibration, In: Nanoscale calibration standards and methods : dimensional and related measurements in the micro- and nanometer range, 2005, S. 173 - 192, ISBN 3-527-40502-X; ISBN 978-3-527-40502-2
• Dziomba, T.; Dai, G.; Mirande, W.; Koenders, L.; Safronava, O.; Shubin, A.: Certified calibration and uniformity investigations of “TGZ” lateral & step height standards, In:  materialy simpoziuma Niznij Novgorod, 25 - 29 marta 2005, 2005, S. 145 - 146
• Koenders, L.; Yacoot, A.: Tip geometry and tip-sample interactions in Scanning Probe Microscopy (SPM), In: the 5th International Workshop on Automatic Processing of Fringe Patterns, 2005, S. 456 - 463, ISBN 3-540-26037-4
• Dai, G.; Koenders, L.; Pohlenz, F.; Dziomba, T.; Danzebrink, H.-U.: Accurate and traceable calibration of one-dimensional gratings, In: Measurement Science and Technology 16 (2005), Nr. 6, S. 1241 - 1249
• Koenders, L.; Dziomba, T.; Thomsen-Schmidt, P.; Wilkening, G.: Standards for the calibration of instruments for dimensional nanometrology, In: Nanoscale calibration standards and methods : dimensional and related measurements in the micro- and nanometer range, 2005, S. 245 - 258, ISBN 3-527-40502-X; ISBN 978-3-527-40502-2
• Dziomba, T.; Koenders, L.; Wilkening, G.: Standardization in dimensional nanometrology: development of a calibration guideline for Scanning Probe Microscopy, In: SPIE, 2005 (Proceedings of SPIE: 5965), S. 59650C-1 - 59650C-12, ISBN 0-8194-5983-6
• Dai, G.; Dziomba, T.; Xu, M.; Koenders, L.; Wilkening, G.: Accurate and traceable 3D calibration of nanoscale standards, In: Proceedings of the 5th International Conference of the European Society for Precision Engineering and Nanotechnology, May 8th - May 11th 2001, Montpellier, 2005, S. 141 - 144, SBN 92-990035-0-5
• Koenders, L.; Meli, F.: Height and pitch at nanoscale - how traceable is nanometrology ?, In: Nanoscale calibration standards and methods : dimensional and related measurements in the micro- and nanometer range, 2005, S. 205 - 219, ISBN 3-527-40502-X; ISBN 978-3-527-40502-2

• Koenders, L.; Dziomba, T.; Thomsen-Schmidt, P.; Senoner, M.: Normale für die dimensionelle und analytische Nanometrologie, In: PTB-Mitteilungen 114 (2004), Nr. 1, S. 16 - 24
• Dziomba, T.; Koenders, L.; Danzebrink, H.-U.; Wilkening, G.: Lateral & vertical calibration of Scanning Probe Microscopes and their measurement uncertainty, In: Dietzsch, M. (Hrsg.): XI. International Colloquium on Surfaces: Proceedings. Part 2. Aachen : Shaker, 2004, S. 117 - 128, ISBN 3-8322-2419-X
• Koenders, L.; Wilkening, G.: Supplementary comparison in the field of nanometrology: Step height (NANO 2), In:  XI. International Colloquium on Surfaces: Proceedings. Part 2. Aachen, 2004, S. 139 - 145, ISBN 3-8322-2419-X
• Dziomba, T.; Koenders, L.; Danzebrink, H.-U.; Wilkening, G.: Systematic characterization of SPM systems [poster], In: Scanning Probe Microscopy - 2004 : international workshop ; proceedings, 2004, S. 230 - 235

• Yacoot, A.; Koenders, L.: From nanometre to millimetre: a feasibility study of the combination of scanning probe microscopy and combined optical and x-ray interferometry, In: Measurement science and technology 14 (2003), S. N59 - N63
• Herrmann, K.; Hasche, K.; Wilkening, G.; Koenders, L.; Danzebrink, H.-U.; Pohlenz, F.; Thomsen-Schmidt, P.; Hoffmann, K.-P.: Development tendencies of nanometrology, In: Mašinostroenie i technosfera XXI veka : sbornik trudov ; IX mezdunarodnoj naucno-techniceskoj konferencii, 2003, S. 85 - 92, ISBN 966-7907-11-2
• Koenders, L.: Scanning probe microscopy - from atomic scale to millimeter, In: Dynamic calibration and measurement : proceeding[s] of CIMM-PTB Seminar 2003. [S.l.] : Donetskij Natsional'nyj Techniceskij Univ., 2003, S. 1 - 10
• Koenders, L.; Harms, C. H.; Waltereit, E.; Wilkening, G.: An ultra precision interference comparator for dimensional measurements using two tunnelling microscopes as probes, In: Measurement science and technology 14 (2003), S. 943 - 952
• Dziomba, T.; Häßler-Grohne, W.; Bosse, H.; Danzebrink, H.-U.; Koenders, L.; Wilkening, G.: Influence of nanostandard properties on calibration procedures of SPMs, In: Scanning Probe Microscopy 2003: Proceedings, March 2-5, 2003, S. 77 - 80
• Koenders, L.; Bergmans, R.; Garnaes, J.; Haycocks, J.; Korolev, N.; Kurosawa, T.; Meli, F.; Park, B.-C.; Peng, G. S.; Picotto, G. B.; Prieto, E.; Gao, S.; Smereczynska, B.; Vorburger, T.; Wilkening, G.: Comparison on nanometrology: Nano 2 - step height : final report, In: Metrologia 40 (2003), [Online only]
• Koenders, L.; Wilkening, G.: International comparison in the field of nanometrology: step height (NANO2), In: Euspen : international topical conference on precision engineering, micro technology, measurement techniques and equipment : proceedings. Vol. 2, 2003, S. 475 - 478,  ISBN 3-926832-30-4

• Herrmann, K.; Koenders, L.; Danzebrink, H.-U.; Hasche, K.; Wilkening, G.; Pohlenz, F.; Kuetgens, U.; Mirandé, W.; Yacoot, A.: Dimensionelle Metrologie mittels Rastersondenmikroskopie, Technisches Messen 69 (2002), 12, 519-525
• Breil, R.; Fries, T.; Garnaes, J.; Haycocks, J.; Hüser, D.; Joergensen, J.; Kautek, W.; Koenders, L.; Nofod, N.; Koops, K. R.; Korntner, R.; Lindner, B.; Mirandé, Werner; Neubauer, A.; Peltonen, J.; Picotto, G. B.; Pisani, M.; Rothe, H.; Sahre, M.; Stedman, M.; Wilkening, G.: Intercomparison of scanning probe microscopes, In: Precision Engineering 26 (2002), Nr. 3, S. 296 - 305

• Yacoot, A.; Downs,M.J.: The use of x-ray interferometry to investigate the linearity of the NPL Differential Plane Mirror Optical Interferometer, Meas. Sci. Technol. 11 (2000), S. 1126–1130